Nanoparticle Thin Films for Gas Sensors Prepared by Matrix Assisted Pulsed Laser Evaporation

Abstract

The matrix assisted pulsed laser evaporation (MAPLE) technique has been used for the deposition of metal dioxide (TiO2, SnO2) nanoparticle thin films for gas sensor applications. For this purpose, colloidal metal dioxide nanoparticles were diluted in volatile solvents, the solution was frozen at the liquid nitrogen temperature and irradiated with a pulsed excimer laser. The dioxide nanoparticles were deposited on Si and Al2O3 substrates. A rather uniform distribution of TiO2 nanoparticles with an average size of about 10 nm and of SnO2 nanoparticles with an average size of about 3 nm was obtained, as demonstrated by high resolution scanning electron microscopy (SEM-FEG) inspections. Gas-sensing devices based on the resistive transduction mechanism were fabricated by depositing the nanoparticle thin films onto suitable rough alumina substrates equipped with interdigitated electrical contacts and heating elements. Electrical characterization measurements were carried out in controlled environment. The results of the gas-sensing tests towards low concentrations of ethanol and acetone vapors are reported. Typical gas sensor parameters (gas responses, response/recovery time, sensitivity, and low detection limit) towards ethanol and acetone are presented.

Selective detection of naphthalene with nanostructured WO<sub>3</sub> gas sensors prepared by pulsed laser deposition

“…Porous nanostructured layers have been studied especially in the context of gas sensing materials (Caricato et al, 2009;Nam et al, 2006). PLD offers many advantages compared to other deposition methods, for example easily controllable film composition by deposition parameters, and a good repetition of stoichiometry of the target material in the films deposited on the substrate.…”

Halbleitergassensoren: Trockensynthese und Anwendung

“…Die mit den unterschiedlichen Methoden erhaltenen Materialien und Filme werden diskutiert und hinsichtlich ihrer Strukturparameter und Leistung klassifiziert. Über einige der Trockenmethoden wie Matrix-unterstützte Verdampfung mit gepulstem Laser (Matrix Assisted Pulsed Laser Evaporation), [63] (gepulste) Laserablation, [58] Atomlagenabscheidung, [64] Flammensynthese, [65] Laserstrahlverdampfen und reaktive Molekularstrahlepitaxie gibt es bereits eigene Aufsätze. [66] Hier werden wir uns auf die technischen Aspekte derjenigen Herstellungsmethoden konzentrieren, die für das funktionelle Design von Sensorfilmen geeignet sind.…”

Matrix-Assisted Pulsed Laser Evaporation (MAPLE) technique for deposition of hybrid nanostructures

“…Wu et al [57] deposited carbon nanotube film by MAPLE method. And after that success, TiO 2 and SnO 2 nanoparticles were deposited by the researchers [58]. After characterization, the researchers found that the nanoparticles maintain same crystal structure and size.…”