1996
DOI: 10.1103/physrevb.53.1749
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Nanosecond-to-femtosecond laser-induced breakdown in dielectrics

Abstract: We report extensive laser-induced damage threshold measurements on dielectric materials at wavelengths of 1053 and 526 nm for pulse durations ranging from 140 fs to 1 ns. Qualitative differences in the morphology of damage and a departure from the diffusion-dominated 1/2 scaling of the damage fluence indicate that damage occurs from ablation for р10 ps and from conventional melting, boiling, and fracture for Ͼ50 ps. We find a decreasing threshold fluence associated with a gradual transition from the long-pulse… Show more

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Cited by 1,413 publications
(946 citation statements)
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References 34 publications
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“…It has long been recognized that material removal by ablation strongly depends on the material's properties and the parameters of the laser pulse like fluence, wavelength, and pulse duration. [44][45][46][47][48][49][50][51][52][53][54] The complexity of the ablation process is related to the coupling mechanism of the laser light to the sample as the optical and thermal properties may change considerably upon laser exposure due to heating, formation of excited species, phase transitions, plasma formation, and photochemical reactions. In particular, it has been recognized [44][45][46][47][48][49][50][51][52][53][54] that for ablation of metals short laser pulses have a great advantage because (i) during the laser pulse no free (transparent) plasma can develop; (ii) heat diffusion into the material is negligible.…”
Section: Resultsmentioning
confidence: 99%
“…It has long been recognized that material removal by ablation strongly depends on the material's properties and the parameters of the laser pulse like fluence, wavelength, and pulse duration. [44][45][46][47][48][49][50][51][52][53][54] The complexity of the ablation process is related to the coupling mechanism of the laser light to the sample as the optical and thermal properties may change considerably upon laser exposure due to heating, formation of excited species, phase transitions, plasma formation, and photochemical reactions. In particular, it has been recognized [44][45][46][47][48][49][50][51][52][53][54] that for ablation of metals short laser pulses have a great advantage because (i) during the laser pulse no free (transparent) plasma can develop; (ii) heat diffusion into the material is negligible.…”
Section: Resultsmentioning
confidence: 99%
“…For such pulses, the electron dynamics in the timedependent field of the pulse be described in terms of the density matrix whose evolution is determined by rate equations with phenomenological relaxation and generation times [19][20][21][22][23] . In this description, the effect of the pulse electric field is restricted to generation of an electronhole plasma through multiphoton or collisional ionization processes.…”
Section: Introductionmentioning
confidence: 99%
“…Hence, femtosecond laser ablation can yield precise materials processing resulting from efficient energy deposition while simultaneously minimizing heat conduction and thermal damage to surrounding material. Focussed intensities I>10 13 W/cm 2 are easily obtained with micro-joule pulses and the processing of, for example, normally transparent dielectrics can be achieved through multi-photon absorption [113]. Metals can be ablated quite easily [114] and the absence of a heat affected zone (HAZ), like in ordinary nspulse material processing, makes femtosecond pulse micro-machining a fast developing technology.…”
Section: Ultrafast Plasma Modelingmentioning
confidence: 99%