2007
DOI: 10.1143/jjap.46.2629
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Nanowire Field-Effect Transistor

Abstract: A new processing scheme for the fabrication of sub-100-nm-gate-length vertical nanowire transistors has been developed. InAs transistors with an 11 Â 11 nanowire matrix and 80 nm gate length have been realized by this process. The gate length is directly controlled via the thickness of the evaporated gate metal and is thus easily scalable. The demonstrated devices operate in depletion mode, and they show a maximum drive current of about 1 mA and a maximum transconductance of 0.52 mS at V g ¼ À0:5 V and V d ¼ 1… Show more

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Cited by 21 publications
(7 citation statements)
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“…InAs nanowires have been grown by Chemical Beam Epitaxy and by Metal Organic Vapor Phase Epitaxy using conventional source materials in an Au-particle assisted growth mode. Well-defined arrays (one to one hundred) of nanowires with diameters down below 20 nm have been demonstrated and these arrays are used for processing of vertical wrap-gate transistors in a simple process scheme using standard deposition and etching processes [4]. Metal gates of either Au or Cr have been deposited via direct evaporation and high-κ dielectric (HfO 2 ) has been used to isolate the gate.…”
Section: Methodsmentioning
confidence: 99%
“…InAs nanowires have been grown by Chemical Beam Epitaxy and by Metal Organic Vapor Phase Epitaxy using conventional source materials in an Au-particle assisted growth mode. Well-defined arrays (one to one hundred) of nanowires with diameters down below 20 nm have been demonstrated and these arrays are used for processing of vertical wrap-gate transistors in a simple process scheme using standard deposition and etching processes [4]. Metal gates of either Au or Cr have been deposited via direct evaporation and high-κ dielectric (HfO 2 ) has been used to isolate the gate.…”
Section: Methodsmentioning
confidence: 99%
“…The energy bandgap (E g ) of the 2D layers can be estimated by using the relation of the direct optical transition: 41 E g (eV ) ≈ 1240 λ e (nm) [ 2 ] Where λ e is the transmission onset. Using equation 2 a bandgap of 3.65 eV was calculated for the ZnO thin films deposited at temperatures ≥ 50 • C. We did not observe any transmission change with the increase of the layer thickness (for example when the passed charge densities were 0.6 or 0.8 C cm −2 ).…”
Section: Zno 2d Layer Compositionmentioning
confidence: 99%
“…Zinc oxide is a transparent n-type semiconductor with very interesting optical and electrical properties such as a direct bandgap around 3.3 eV, a large exciton binding energy (60 meV), a good electron conductivity, piezoelectricity and biocompatibility. It has found numerous applications such as piezoelectric transducers, [1][2][3] field effect transistors, [2][3][4] gas sensors, 5 light-emitting diodes, 6 optical waveguide, 7 in solar cells 8,[14][15][16][17][18][19][20][21][22][23][24][25][26] etc.…”
mentioning
confidence: 99%
“…A great number of novel applications in optics, optoelectronics, catalysis, sensing, and energy conversion has been demonstrated. [1][2][3][4][5][6] Uniform and free standing assembly of nanostructures like nanowires or -tubes, especially vertical aligned arrays of semiconductive nanostructures with a high length/diameter aspect ratio are promising materials for photovoltaic or light emitting applications, due to their well defined channels working as carriers. [7,8] Many different methods of synthesis for nanowires and nanotubes are well known, for example: sol-gel procedure or electrophoretic deposition.…”
Section: By Mario Boehme * and Wolfgang Ensingermentioning
confidence: 99%