New aspects of micromachining and microlithography using 157-nm excimer laser radiation

Fiebig, Michael; Kauf, Michael; Fair, John H.; Endert, Heinrich; Rahe, Manfred; Basting, D.

doi:10.1007/s003390051405

Cited by 12 publications

(5 citation statements)

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“…Bulky Side Chains. Because of the importance of fluorinated polymers in a wide range of new industrial applications, from dry cleaning to microlithography, , the photochemistry of PFOMA ( 2 ) was investigated. Fluorination of the alkyl tail of the ester group increases the rigidity of the polymer chain, decreasing the internal motion of the polymer. , It should certainly be expected that the TREPR spectra of the radical from the photolysis of PFOMA will be much broader than the radical from PMMA.…”

Section: Resultsmentioning

confidence: 99%

Time-Resolved EPR Studies of Main Chain Radicals from Acrylic Polymers. Effects of Tacticity, Solvent, and Side Group Structure on Chain Stiffness

2005

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Main chain polymeric radicals from several acrylic polymers, produced by laser flash photolysis at 248 nm in liquid solution, have been studied using direct detection time-resolved electron paramagnetic resonance (TREPR) spectroscopy at 9.5 GHz. Highly isotactic poly(methyl methacrylate) (i-PMMA) shows a sharp, well-resolved spectrum at about 95 degrees C. Using synthetic methodology to disrupt the tacticity of i-PMMA, we observed different fast-motion hyperfine coupling constants for the main chain radicals. By raising the temperature of observation, we returned the coupling constants to the same value as those in the highly isotactic sample. This result is related qualitatively to the degree of stiffness of the polymer chains as a function of tacticity. The concept is tested further by comparison to two other acrylic polymers with bulky side chains: poly(fluorooctyl methacrylate) (PFOMA) and poly(adamantyl methacrylate) (PAMA), whose main chain radicals show significant line broadening even at 110 degrees C. Solvent effects on both spectral appearance (the alternating line-width effect) and kinetic decays (attributed to T1 relaxation) are also presented and discussed in terms of main chain conformational motion.

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Section: Resultsmentioning

confidence: 99%

Time-Resolved EPR Studies of Main Chain Radicals from Acrylic Polymers. Effects of Tacticity, Solvent, and Side Group Structure on Chain Stiffness

2005

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“…Recent advances in cavity design and gas lifetime, together with improved output energy and reliability, have brought about VUV F 2 lasers [1] that can now be considered for industrial use. The move from ArF lasers (λ=193nm) to the F 2 laser emitting at 157nm, along with high purity VUV CaF 2 optics designed to operate over extended time periods, allows the realization of sub 100nm feature resolution [2].…”

Section: Introductionmentioning

confidence: 99%

Interaction of VUV F 2 laser radiation with glasses

2002

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The 157nm F 2 laser wavelength is strongly absorbed by glasses, even those with high silica content, making it potentially well suited for machining these materials by ablation. This is of interest for fabricating micro-optics and micro-devices in glass, provided crack-free surfaces with minimal laser-induced stress and surface roughness can be produced.Experimental studies are reported on the ablation threshold, ablation rate and surface quality of N-BK7 and soda lime glass for exposure with the VUV F 2 laser. Optical probe techniques and etching are employed to determine the ablation threshold and removal rate and scanning electron microscopy to assess the surface quality of the glass following laser exposure. The interaction is discussed within the framework of a thermal vaporization model and the surface thermal loading is used to make a preliminary assessment of resolution attainable in micro-feature definition.

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“…In the above context, the use of F 2 excimer laser sources, emitting at 157 nm, promotes a wide range of scientific, industrial and lithography applications [14][15][16]. It enables micromachining of tough materials like Teflon or fused silica, an area in which high-resolution processing also benefits from the use of the very short wavelengths [17]. F 2 excimer lasers are also used for the modification of sol-gel derived amorphous Al 2 O 3 thin films at ambient temperature; this results in a change of the film from hydrophilic to hydrophobic [18].…”

Section: Introductionmentioning

confidence: 99%

Effect of 193 and 157 nm laser light illumination on the surface properties of TMOS–NiCl₂sol–gel derived material

Αθανασέκος¹,

Kollia²,

Vasileiadis³

et al. 2010

J. Opt.

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Sol–gel tetramethoxyorthosilicate (TMOS) derived composite thin films comprising embedded NiCl2 nanoparticles, were illuminated and processed by 193 and 157 nm excimer laser radiation. The effect of different laser fluences of 193 nm and the number of 157 nm pulses on the material surface was studied. Atomic force microscopy imaging was used to evaluate the effects of the irradiation. It was found that surface morphology was modified in a controllable way, with physical and chemical properties strongly depending on the illumination conditions. Ablative ultraviolet laser surface processing is a generic single-step approach that can be applied successfully in composite materials. Applications involve micro/nanostructure formation for use in hybrid photonic and optoelectronic devices and other applications.

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New aspects of micromachining and microlithography using 157-nm excimer laser radiation

Cited by 12 publications

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Time-Resolved EPR Studies of Main Chain Radicals from Acrylic Polymers. Effects of Tacticity, Solvent, and Side Group Structure on Chain Stiffness

Time-Resolved EPR Studies of Main Chain Radicals from Acrylic Polymers. Effects of Tacticity, Solvent, and Side Group Structure on Chain Stiffness

Interaction of VUV F 2 laser radiation with glasses

Effect of 193 and 157 nm laser light illumination on the surface properties of TMOS–NiCl₂sol–gel derived material

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New aspects of micromachining and microlithography using 157-nm excimer laser radiation

Cited by 12 publications

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Time-Resolved EPR Studies of Main Chain Radicals from Acrylic Polymers. Effects of Tacticity, Solvent, and Side Group Structure on Chain Stiffness

Time-Resolved EPR Studies of Main Chain Radicals from Acrylic Polymers. Effects of Tacticity, Solvent, and Side Group Structure on Chain Stiffness

Interaction of VUV F 2 laser radiation with glasses

Effect of 193 and 157 nm laser light illumination on the surface properties of TMOS–NiCl2sol–gel derived material

Contact Info

Product

Resources

About

Effect of 193 and 157 nm laser light illumination on the surface properties of TMOS–NiCl₂sol–gel derived material