2004
DOI: 10.1016/s1464-2859(04)00290-1
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New proton-conducting porous silicon membrane for small fuel cells

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Cited by 22 publications
(21 citation statements)
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“…As proved by conductivity measurements (Pichonat 2004) and FESEM imaging (Fig. 3), only a few channels are totally opened with this anodization process.…”
Section: Porous Siliconmentioning
confidence: 70%
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“…As proved by conductivity measurements (Pichonat 2004) and FESEM imaging (Fig. 3), only a few channels are totally opened with this anodization process.…”
Section: Porous Siliconmentioning
confidence: 70%
“…The bulk resistivity was chosen as a function of the desired porous silicon morphology. The process, described in details elsewhere (Pichonat 2004), includes six steps: thin thermal oxidation of the silicon wafer (1.2 lm thick) (step 1), sputtered Cr-Au layer (Cr layer of 15 nm thick and Au layer of 800 nm thick) on the silicon oxide layer (step 2) in order to enable the localization of the porosity during anodization and to collect current in the future fuel cell, photoresist deposition (step 3), UV exposure through a photolithography mask and development in an adapted solution (step 4), desoxidation of insolated patterns (step 5) and then KOH etching (step 6). We make sure that each side is electrically insulated from the other thanks to the silicon oxide layers by measuring the electrical resistance between both sides (R>2 MX).…”
Section: Silicon Membranementioning
confidence: 99%
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“…Previous works have reported the relevance to use PS directly as the membrane of the FC, either as the support for a NafionÒ solution (Pichonat et al 2004;Pichonat and Gauthier-Manuel 2006) or with appropriate proton-conducting molecules grafted on the pore walls (Pichonat and Gauthier-Manuel 2005). This second solution involves the chemical grafting of silane molecules containing sulfonate (SO 3 -) or carboxylate (COO -) groups on the pores walls in order to mimic the structure of an ionomer.…”
Section: Principlementioning
confidence: 99%
“…Beyond standard silicon, the use of porous silicon (PS) has also been demonstrated as an attractive material for gas diffusion layer (Maynard and Meyers 2000), support for catalyst (D'Arrigo et al 2003;Riezenman 2003) or as a reformer (Presting et al 2004) in the case of FCs. Recent papers (Pichonat et al 2004;Gold et al 2004) have also shown the relevance of using PS as the membrane of a FC. This paper will focus on MEMS-based FCs and will show some of the most recent developments and technologies applied to this kind of miniature FCs.…”
Section: Introductionmentioning
confidence: 99%