New Routes in the Preparation of Mechanically Hard Films

Abstract

Superhard nitride superlattice coatings with nanometer-scale multilayers have hardnesses exceeding 50 gigapascals, making these films highly resistant to abrasion. The nitride superlattice films can be deposited economically by reactive sputtering in production-size equipment on a variety of substrates. A model for the superlattice strength enhancement has been developed that accurately predicts which materials can be used together to produce the enhanced hardness. Advancements in sputtering technology-specifically, pulsed dc power and reactive-gas partial-pressure control-make it possible to reactively deposit nonconducting oxide films at high deposition rates. This technology is being used along with the superlattice strength model in the development of oxide superlattice films.

Structure and mechanical properties of low temperature magnetron sputtered nanocrystalline (nc-)Ti(N,C)/amorphous diamond like carbon (a-C:H) coatings

“…Tribological coatings for demanding wear resistant applications are required to combine a range of different functional properties such as high hardness, corrosion resistance, thermal stability and low friction coefficients [1]. For that reason physical vapour deposition (PVD) coatings based on the TiCN system have gained considerable attention, since they combine properties of both TiN and TiC, and are known to offer enhanced wear resistance when deposited on tool steel and cermet substrates [2][3][4].…”

Toughness enhancement in zirconium-tungsten-nitride nanocrystalline hard coatings

“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18] Since the very first successful commercialization of TiN, the field of nitrides has become widespread and diversified to include other complex applications such as automotive, aerospace, microelectronics, and biomedical technologies. [15][16][17][18][19][20] However, rapid progress made coupled with ever increasing demand for performance and efficiency enhancement and current nanotechnology challenges are the prime factors constantly driving the thrust to design new coating materials and/or new architectures to further improve the properties and high-temperature stability of the coatings.…”

In situ scanning electron microscopy indentation studies on multilayer nitride films: Methodology and deformation mechanisms

“…23,24 Thus, NbN was first developed for a variety of applications such as superconducting electronics, 25 field-emission cathodes, 26 and microelectronics. Such interesting combinations of properties have brought these nitrides under continuous development since mid-1980s, 18,25 not only for tribological applications 3,27 but also for decorative applications in the case of TiN. 28 It is thought that if these constituent materials could be properly combined, for example as multilayer nanolaminates, their combined properties could be tailored for specific applications.…”

“…1,2 This is due to their high hardness and reasonable toughness, which combine to give superior tribological performance compared to uncoated devices. [3][4][5] Tribological issues are especially important for MEMS applications where excessive wear of the single-and polycrystalline silicon elements in motion drastically limit device designs and lifetimes.…”