Nitride film deposition by femtosecond and nanosecond laser ablation in low-pressure nitrogen discharge gas

Zhang, Z; VanRompay, P.A.; Nees, J.; Clarke, Roy; Pan, Xiaoqing; Pronko, P. P.

doi:10.1016/s0169-4332(99)00381-5

Cited by 35 publications

(12 citation statements)

References 4 publications

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“…[6][7][8][9][10][11][12][13][14][15] In spite of this effort, however, very little has been done on the nature and properties of the material obtained from this ablation process once it is deposited on a substrate surface, either in the form of a continuous film or as nanoparticles. Deposition of continuous thin films using fs lasers has been successful in the case of oxides or nitrides, [16][17][18][19][20][21] with ablation in the presence of a gas in the deposition chamber that reacts or interacts to some extent with the ejected material, leading to the growth of a continuous film on the substrate.…”

Section: Introductionmentioning

confidence: 99%

Growth and magnetic characterization of Co nanoparticles obtained by femtosecond pulsed laser deposition

Cebollada

Martin²,

Clavero³

et al. 2009

Phys. Rev. B

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We present a detailed study on the morphology and magnetic properties of Co nanostructures deposited onto oxidized Si substrates by femtosecond pulsed laser deposition. Generally, Co disks of nanometric dimensions are obtained just above the ablation threshold, with a size distribution characterized by an increasingly larger number of disks as their size diminishes, and with a maximum disk size that depends on the laser power density. In Au/Co/Au structures, in-plane magnetic anisotropy is observed in all cases, with no indication of superparamagnetism regardless of the amount of material or the laser power density. Magnetic force microscopy observations show coexistence of single-domain and vortex states for the magnetic domain structure of the disks. Superconducting quantum interference device magnetometry and x-ray magnetic circular dichroism measurements point to saturation magnetization values lower than the bulk, probably due to partial oxidation of the Co resulting from incomplete coverage by the Au capping layer.

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Section: Introductionmentioning

confidence: 99%

Growth and magnetic characterization of Co nanoparticles obtained by femtosecond pulsed laser deposition

Cebollada

Martin²,

Clavero³

et al. 2009

Phys. Rev. B

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“…The additional energetic electrons generated in the plasma through the plasma assistance will increase the effective collisions probability and promote both the activation of N 2 molecules and radical formation. Even if the general features of films growth are driven differently for fs-PLD and ns-PLD [48], the use of fs-PLD under N 2 pressure and plasma assistance does not lead to significant different atomic bonding results compared to the use of nanosecond laser. In particular C≡N bonds are observed under plasma assistance in both conditions [12].…”

Section: Table2 Xps C1s Andmentioning

confidence: 99%

High N-content a-C:N films elaborated by femtosecond PLD with plasma assistance

Maddi

Donnet

Loir

et al. 2015

Applied Surface Science

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Amorphous carbon nitride (a-C:N) thin films are a interesting class of carbon-based electrode materials.Therefore, synthesis and characterization of these materials have found lot of interest in environmental analytical microsystems. Herein, we report the nitrogen-doped amorphous carbon thin film elaboration by femtosecond pulsed laser deposition (fs-PLD) both with and without a plasma assistance. The chemical composition and atomic bonding configuration of the films were investigated by multi-wavelength (MW) Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and electron energy-loss spectroscopy (EELS). The highest nitrogen content, 28 at.%, was obtained with plasma assistance. The I(D)/I(G) ratio and the G peak position increased as a function of nitrogen concentration, whereas the dispersion and full width at half maximum (FWHM) of G peak decreased. This indicates more ordered graphitic like structures in the films both in terms of topological and structural, depending on the nitrogen content.EELS investigations were correlated with MW Raman results. The interpretation of XPS spectra of carbon nitride films remains a challenge. Plasma assisted PLD in the femtosecond regime led to a significant high nitrogen concentration, which is highlighted on the basis of collisional processes in the carbon plasma plume interacting with the nitrogen plasma.

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“…Different lasers have been used for subps ablation: KrF excimer laser (λ = 248 nm, ∆t= 0.5 − 500 ps) [2,8,9], Ti: sapphire laser (λ = 780 − 790 nm, ∆t= 100 − 200 fs) [7,10,11] and CPM dye laser (λ = 620 nm, ∆t= 90 fs ) [12].…”

Section: Introductionmentioning

confidence: 99%

Properties of Er – doped layers grown from Er: YAG (YAP) crystalline targets by sub-picosecond laser deposition

et al. 2004

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Thin YAG (Y 3 Al 5 O 12 ) and YAP (YAlO 3 ) films doped with Er content were grown by sub-picosecond (450 fs) KrF laser deposition from crystalline Er: YAG and Er: YAP laser rods. The influence of laser power density, substrate temperature, target-substrate distance and deposition ambient atmosphere (vacuum or oxygen) was studied. Results of morphological, compositional, structural and luminescence analysis are presented. Crystalline films have been obtained even for low substrate temperature. Luminescence corresponding to Er +3 ions was observed for all the samples.

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Nitride film deposition by femtosecond and nanosecond laser ablation in low-pressure nitrogen discharge gas

Cited by 35 publications

References 4 publications

Growth and magnetic characterization of Co nanoparticles obtained by femtosecond pulsed laser deposition

Growth and magnetic characterization of Co nanoparticles obtained by femtosecond pulsed laser deposition

High N-content a-C:N films elaborated by femtosecond PLD with plasma assistance

Properties of Er – doped layers grown from Er: YAG (YAP) crystalline targets by sub-picosecond laser deposition

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