Nitrogen doping of fluorinated amorphous carbon thin films: structural and optical properties evolution upon thermal annealing

Valentini, Luca; Braca, E.; Kenny, J. M.; Fedosenko, G.; Engemann, J.; Lozzi, L.; Santucci, S.

doi:10.1016/s0040-6090(02)00084-6

Cited by 8 publications

(7 citation statements)

References 21 publications

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“…That is to say, the aromatic ring structure ratio is augmented and the olefin structure ratio falls. Kleinsorge and Valentini point out that N is not directly a part of the sp 2 clusters detected by Raman spectroscopy and that N acts as a bridge between the sp 2 C and sp 3 C sites or that N-containing clusters behave similarly to N-free ones [16,17]. The shift in the RS to a higher wave number of the G-peak position of the films deposited by high r.f.-power can also be attributed mainly to an increase in sp 2 carbon sites [18].…”

Section: Resultsmentioning

confidence: 99%

Effect of radio frequency power on the structural and optical properties of nitrogen doping of fluorinated diamond-like carbon thin films

Xiao¹,

Jiang²

2008

J. Phys. D: Appl. Phys.

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Nitrogen doped fluorinated diamond-like carbon films were grown from CF4, CH4 and N2, using a radio frequency plasma enhanced chemical vapour deposition reactor. Film composition and structure were analysed by Raman spectroscopy and Fourier transform infrared absorption spectrometry. The optical transmission and absorption properties of the films were characterized by a UV-VIS spectrophotometer. The results indicate the presence of C–Hx (x = 1, 2, 3), C–F, C–F2, C≡N and C=CF2 groups in the films. The ratio of C–C to C–F concentration in the films increases with the increase in r.f.-power, and it can be affirmed that the cross-linked structure of the films enhances with increasing r.f.-power. The optical band gap (Eg) of the films is in the range from 1.88 to 2.45 eV and decreases with increasing r.f.-power.

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Section: Resultsmentioning

confidence: 99%

Effect of radio frequency power on the structural and optical properties of nitrogen doping of fluorinated diamond-like carbon thin films

Xiao¹,

Jiang²

2008

J. Phys. D: Appl. Phys.

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“…These peaks are consistent with the characteristic peaks of C, N, and F reported in the literature. 1,[26][27][28] However, the corresponding energies of the peaks are all slightly higher than those in the literature, 29) which may be due to the different preparation methods used.…”

Section: Xps Analysis Of N-doped F-dlc Filmsmentioning

confidence: 98%

“…This can explain the notion that the intensity of the band corresponding to C-F bonds increases with increasing nitrogen flow ratio in the FTIR spectrum. 1,7,26,[29][30][31] The relative percentage sp 2 C and sp 3 C contents of the films were obtained on the basis of the area under each fitted peak. The peak moves slightly toward lower energies because of N doping.…”

Section: Xps Analysis Of N-doped F-dlc Filmsmentioning

confidence: 99%

“…Fluorinated diamond-like carbon (F-DLC) films have low refractive index, good light transmission, low dielectric constant, good hydrophobicity, and high hardness. F-DLC films can be used as protective films for infrared optical glass, [1][2][3][4][5] dielectric layers of large-scale integrated circuits, [6][7][8][9] water proof layers for medical equipment, [10][11][12] disk protective layers, wear-resistant coating, [13][14][15] and so on. The properties of F-DLC films are mainly determined by the content ratio of the graphite phase sp 2 to the diamond phase sp 3 in the films.…”

Section: Introductionmentioning

confidence: 99%

“…Franceschini et al 19) found that, after N doping, sp 3 N structures replace sp 2 C structures in DLC films. Valentini et al 1) suggested that, after N doping, the refractive index of DLC films increases with increasing N content in the films.…”

Section: Introductionmentioning

confidence: 99%

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Effect of Nitrogen Doping on the Structure and Optical Band Gap of Fluorinated Diamond-Like Carbon Films

Xiao¹,

Jiang

Wang³

2013

Jpn. J. Appl. Phys.

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Radio-frequency plasma-enhanced chemical vapor deposition technology was applied to the manufacture of nitrogen-doped fluorinated diamond-like carbon films under different nitrogen flow ratios. Atomic force microscopy, Fourier transform infrared absorption spectroscopy, X-ray photoelectron spectroscopy, and ultraviolet–visible spectroscopy were performed to determine the surface morphology, microscopic structure, and optical properties of the films. The spectra of the films were analyzed using a Gaussian peak-fitting algorithm. The films manufactured using this technology were compact and even. As the nitrogen flow ratio increased, the surface roughness of the films decreased. Nitrogen doping was favorable for graphite phase formation in the films. Moreover, the number of sp2 structures increases. The optical band gap initially increased and then decreased as the nitrogen flow ratio increased slightly.

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Surface functionalization of nitrogen-doped carbon derived from protein as anode material for lithium storage

Kim

Ahn

2019

Applied Surface Science

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Nitrogen doping of fluorinated amorphous carbon thin films: structural and optical properties evolution upon thermal annealing

Cited by 8 publications

References 21 publications

Effect of radio frequency power on the structural and optical properties of nitrogen doping of fluorinated diamond-like carbon thin films

Effect of radio frequency power on the structural and optical properties of nitrogen doping of fluorinated diamond-like carbon thin films

Effect of Nitrogen Doping on the Structure and Optical Band Gap of Fluorinated Diamond-Like Carbon Films

Surface functionalization of nitrogen-doped carbon derived from protein as anode material for lithium storage

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