The research question that is addressed in this paper relates to the performance limitations of thermal flow sensors due to miniaturization. Sensor elements in current microflow sensors are mostly made by metal thin films. The problem is that thin-films reproduce poorly and that practically all material properties are subject to drift. This drift and poor reproducibility translates directly into the accuracy of thermal microflow sensors. This paper presents a thermal flow sensor consisting of freely suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si ++ thermopile in combination with up and downstream Al heater resistors. The drift-free zero offset of a thermopile at uniform temperature is exploited in a feedback loop controlling the dissipated powers in Al heater resistors, reducing inevitable influences of resistance drift, and mismatch of thinfilm metal resistors. The control system attempts to cancel the flow-induced temperature imbalance across the thermopile by controlling a power difference between both heater resistors, thereby giving a measure of the flow rate nearly independent of material drift.[2013-0258] Index Terms-Microfluidics, thermal flow sensor, Kelvincontact sensing, thermopile, drift reduction, power-feedback control system.
I. INTRODUCTIONF LOW SENSORS find applications in many areas in industry. Applications range from motorcars, process industry, analysis and synthesis in chemistry, pharmacy, biology and medicine. The emerging fields of micro total-analysis systems (micro-TAS), micro reactors and bio-MEMS drives the need for further miniaturization of flow sensors capable of measuring minute amounts of liquid flow. Miniaturization has intrinsic advantages such as high speed, small amounts of fluid required for analysis and portability, but perhaps more importantly fluidic components are being integrated in complete microfluidic systems. The control of these systems is only possible with sensors measuring quantities such as pressure, temperature and flow. The need for small and reliable sensors makes flow sensing an important application in microsystem technology.