Abstract:This paper investigates SiGe profile design tradeoffs for low-noise RF applications at a given technology generation (i.e., fixed minimum feature size and thermal cycle). An intuitive model relating structural parameters and biases to noise parameters is used to identify the noise limiting factors in a given technology. The noise performance can be improved by pushing more Ge into the base and creating a larger Ge gradient in the base. To maintain the SiGe film stability, the retrograding of the Ge into the co… Show more
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