We investigated the effects of quantum confinement in determining the interface traps (Dit) and border traps (Nbt) of ALD deposited Al2O3 with temperature variations onto InxGa1-xAs on a 300mm Si (001) substrate. We also analysed the impact of these effects on the total gate capacitance of highk/Si and high-k/InxGa1-xAs structures using 1D Poisson-Schrodinger solver simulation tool (Nextnano). While quantum confinement has no or very little impact on the gate capacitance of high-k/Si structure, it has a considerably high amount of impact on the high-k/InxGa1-xAs structures and substantially lowers the total gate capacitance. To reflect the actual thickness between the insulator-semiconductor interface and charge centroid, capacitance-equivalent-thickness was used to reflect the effects of quantum confinement in the InxGa1-xAs layer. The Dit and Nbt values extracted using capacitance-equivalent-thickness were observed to be around 10% and 25%, respectively, higher than the values of extraction with equivalent-oxidethickness. INDEX TERMS Interface trap density, border trap density, quantum mechanical effect, high-k, III-V substrate.