Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution

Tan, Chen-Tai; Chan, Yuan-Sheng; Chen, Jhao-An; Liao, Teh-Chao; Chiu, Ming-Hung

doi:10.3788/col201109.101202

Cited by 6 publications

(3 citation statements)

References 4 publications

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Section: Introductionmentioning

confidence: 99%

“…In 2011, we proposed a non-scattering, non-contact, non-interferometric and three-dimensional (3D) optical profilometer with nanometer resolution [19,20]. This 3D profilometer is of two types: the transmission [19] and reflection [20] types. Although the method based on the critical angle principle [19,20] has nanometer resolution, it is only useful for measuring the height range of 1-100 nm.…”

Section: Introductionmentioning

confidence: 99%

“…This 3D profilometer is of two types: the transmission [19] and reflection [20] types. Although the method based on the critical angle principle [19,20] has nanometer resolution, it is only useful for measuring the height range of 1-100 nm. In this paper, for 1-100 μm surface profile measurement, we propose a one-dimensional, non-destructive and reflective surface profilometer.…”

Section: Introductionmentioning

confidence: 99%

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A simple one-dimensional laser-scanning profilometer

Liao¹,

Lin²,

Tan³

et al. 2011

Meas. Sci. Technol.

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A one-dimensional laser-scanning profilometer based on measuring small angle deviations is presented. A laser beam focused on a test surface and reflected back to the lens is deviated at a small angle from the optical axis if the surface is not located at the focal plane. The deviation angle is proportional to the defocus length. We use a parallelogram prism as an angular sensor to measure the deviation angle at the critical angle nearby. Thus the reflectance is also proportional to the surface height. Scanning the test surface, the profile is obtained. The vertical resolution is better than 1 µm and the dynamic range is at least ±50 µm.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A simple one-dimensional laser-scanning profilometer

Liao¹,

Lin²,

Tan³

et al. 2011

Meas. Sci. Technol.

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Correlating Optical Microspectroscopy with 4×4 Transfer Matrix Modeling for Characterizing Birefringent Van der Waals Materials

et al. 2023

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Van der Waals materials exhibit intriguing properties for future electronic and optoelectronic devices. As those unique features strongly depend on the materials' thickness, it has to be accessed precisely for tailoring the performance of a specific device. In this study, a nondestructive and technologically easily implementable approach for accurate thickness determination of birefringent layered materials is introduced by combining optical reflectance measurements with a modular model comprising a 4×4 transfer matrix method and the optical components relevant to light microspectroscopy. This approach is demonstrated being reliable and precise for thickness determination of anisotropic materials like highly oriented pyrolytic graphite and black phosphorus in a range from atomic layers up to more than 100 nm. As a key feature, the method is well‐suited even for encapsulated layers outperforming state of‐the‐art techniques like atomic force microscopy.

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