Non-traditional technologies for microfabrication

Abstract

Although silicon planar technology has generated the field of micromechanics, it has been realized that this technology has intrinsic limitations for the fabrication of truly so micromechanisms. A number of alternative technologies based either on silicon or on different materials are presently investigated in order to overcome the limitations of planar silicon technology. This paper outlines the motivations for developing new microfabrication technologies, especially those that are considered as 'non-traditional' in the microelectronics domain, and the perspectives offered by this approach for fabricating miniature, micro and nanodevices. Four representative 'non-traditional' technologies are considered. LIGA process, micro electro-discharge machining (EDM), micro stereo lithography, and the combination of biological and artificial microfabricated structures ('hybrid' technologies).

Parametric optimization of MRR and surface roughness in wire electro discharge machining (WEDM) of D2 steel using Taguchi-based utility approach

“…In combination with the geometry and accuracy, the WEDM can process materials like hardened steel, silicon, cemented carbide, die steels, and electrically conductive ceramics with submicron precision. Hence, WEDM can be economically used to machine microparts, microdie, and mold especially in single and batch production mode (Dario et al 1999;Receveur et al 2007). In this paper, wire electro discharge machining characteristics of D2 steel were studied and determined the optimum process parameters for maximizing MRR and minimizing surface roughness using utility approach.…”

Micro electric discharge milling process performance: An experimental investigation

“…Being a non-contact process it is capable of machining all types of conductive materials such as metals, metallic alloys, graphite, or even some ceramic materials, of varying hardness [2]. Also mEDM provide advantages such as the ability to manufacture simple and complicated shapes not only with high aspect ratio but also at a lower setup cost [3,4]. Since mEDM provides such advantages, it has become one of the most important methods for manufacturing 3D micro-features parts.…”

Deburring microfeatures using micro-EDM

“…These components, which have a variety of features from a simple hole (Kim et al, 2006) to complex three-dimensional (3D) freeform surfaces, can be produced using a number of manufacturing methods, such as cutting, abrasion, and non-traditional machining (Dario et al, 1995). Milling in particular, which is a cutting process that generates the required shape using mechanical contact and relative motion between a milling flute and a workpiece, can be used with various materials, such as metal, plastics, and ceramics, to produce a microfeature with a high aspect ratio and accuracy.…”