Nonlocal electron electrodynamics in high-frequency capacitive discharges

Kim, H. C.; Park, G. Y.; Lee, J. K.

doi:10.1063/1.2172353

Cited by 4 publications

(2 citation statements)

References 14 publications

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“…The ions gain energy dominantly due to the acceleration toward the electrodes by the voltage drop across the sheaths. 1,26 There are different electron heating mechanisms in a CCRF discharge, 1,5,7,9,16,19,[27][28][29][30][31][32][33][34][35][36] e.g., Ohmic and stochastic heating. A detailed discussion of the different electron heating mechanisms is beyond the scope of this work.…”

Section: A Energy Balances For Electrons and Ionsmentioning

confidence: 99%

Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges

et al. 2011

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The symmetry of capacitive radio frequency discharges can be controlled via the electrical asymmetry effect by driving one electrode with a fundamental frequency and its second harmonic. In such electrically asymmetric discharges, the mean ion energies at both electrodes are controlled separately from the ion flux by tuning the phase angle between the harmonics at fixed voltage amplitudes. Here, the question why the ion flux is nearly independent of is answered by investigating the power absorbed by the electrons P e as a function of and time experimentally, by a particle in cell simulation, and an analytical model. The dynamics of P e is understood by the model and is found to be strongly affected by the choice of. However, on time average, P e is nearly constant, independently of. Thus, the ion flux remains approximately constant. In addition, it is shown that the absolute value of the individual voltages across the powered and grounded electrode sheath vary linearly with the dc self-bias. However, their sum remains constant. This yields, in combination with the constancy of the ion flux, a constant power absorbed by the ions and, in conclusion, a total power absorption that is independent of .

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Section: A Energy Balances For Electrons and Ionsmentioning

confidence: 99%

Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges

et al. 2011

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“…3(c). The rf electric field is nonmonotonic at the bulk-sheath boundary [13] and is orders of magnitude smaller in the bulk than in the sheaths. As the rf voltage increases, the rf electric field in the bulk plasma decreases as a result of the nonlinear coupling between electric field, electron kinetics, and ambipolar diffusion [14].…”

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confidence: 98%

Abnormal Heating of Low-Energy Electrons in Low-Pressure Capacitively Coupled Discharges

et al. 2007

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In low-pressure capacitively coupled plasmas, high-energy electrons are collisionlessly heated by large rf fields in the sheaths while low-energy electrons are confined in the bulk plasma by the ambipolar potential. Low-energy electrons are typically inefficiently heated due to their low collisionality and the weak rf electric field present in the bulk. It is shown, however, that as a result of the nonlinear interaction between the electron motion and the weak rf field present in the bulk, low-energy electrons can be efficiently heated. Electrons in the bulk that bounce inside the electrostatic potential well with a frequency equal to the rf excitation frequency are efficiently heated by the coherent interaction with the rf field. This resonant collisionless heating can be very efficient and manifest itself as a plateau in the electron energy probability function.

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A brief review of dual-frequency capacitively coupled discharges

Liu

Jiang

et al. 2011

Current Applied Physics

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Nonlocal electron electrodynamics in high-frequency capacitive discharges

Cited by 4 publications

References 14 publications

Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges

Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges

Abnormal Heating of Low-Energy Electrons in Low-Pressure Capacitively Coupled Discharges

A brief review of dual-frequency capacitively coupled discharges

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