2015
DOI: 10.1063/1.4905336
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Note: A stand on the basis of atomic force microscope to study substrates for imaging optics

Abstract: A description of a stand based on atomic force microscopy (AFM) for roughness measurements of large optical components with arbitrary surfaces is given. The sample under study is mounted on a uniaxial goniometer which allows the sample to be tilted in the range of ±30°. The inclination enables the local normal along the axis of the probe to be established at any point of the surface under study. A comparison of the results of the measurement of noise and roughness of a flat quartz sample, in the range of spati… Show more

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Cited by 54 publications
(10 citation statements)
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“…The AFM roughness is noticeably lower than that found from the XRDS simulation. This may be due to the low sensitivity of our AFM to small-scale relief with a frequency of >30 mm À1 , revealed from tests with noise (Chkhalo et al, 2015). Nevertheless, despite this, as well as the dispersion of the data for the samples, there is no clear tendency for an increase or decrease in roughness depending on the period.…”
Section: Separation Of Roughness and Materials Intermixingmentioning
confidence: 84%
“…The AFM roughness is noticeably lower than that found from the XRDS simulation. This may be due to the low sensitivity of our AFM to small-scale relief with a frequency of >30 mm À1 , revealed from tests with noise (Chkhalo et al, 2015). Nevertheless, despite this, as well as the dispersion of the data for the samples, there is no clear tendency for an increase or decrease in roughness depending on the period.…”
Section: Separation Of Roughness and Materials Intermixingmentioning
confidence: 84%
“…Среднеквадратическая шероховатость измеряется на зондовом микроскопе N tegra (NT-MDT) в диапазоне пространственных частот (q) 4.9 • 10 −2 −6.3 • 10 1 µm −1 (размеры кадров атомно-силового микроскопа (АСМ) от 2 × 2 до 40 × 40 µm). Значение эффективной шерохова-тости находится из площади под кривой PSD-функции, подробнее о методе можно прочитать в работе [13].…”
Section: описание экспериментаunclassified
“…На результаты измерений значительное влияние может оказать механическая жесткость балки кантилевера. Также при АСМ измерениях необходимо учитывать шумы, которые зависят не только от характеристик используемого прибора, но и внешних условий [31]. Поэтому мы признаем результаты измерений шероховатости достоверными, если функции спектральной плотности мощности шероховатостей PSD (power spectral density), измеренные различными методами, совпадают в области пересечения их рабочих диапазонов.…”
Section: методы измерений шероховатостиunclassified