Novel Method of Offset Voltage Minimization in Hall-Effect Sensor

Petruk, Oleg; Kachniarz, Maciej; Szewczyk, Roman

doi:10.12693/aphyspola.131.1177

Cited by 2 publications

(3 citation statements)

References 7 publications

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“…Hall sensors have many practical advantages, including non-contact operation, high linearity, physical sturdiness, and versatility [ 8 , 9 , 10 ]. As a result, they have attracted significant attention throughout industry and academia in recent years [ 11 , 12 , 13 ]. In the last decade, many sensor fusion techniques have been developed to improve sensing field mapping [ 14 , 15 ].…”

Section: Introductionmentioning

confidence: 99%

“…However, such devices are more expensive and difficult to fabricate than silicon devices. Moreover, they are less easily integrated with the signal-processing circuits and functions required to carry out the sensing operation [ 11 ]. Accordingly, the present study fabricates a magnetic field measurement system based on an array of Hall sensors constructed on silicon substrates using simple microelectromechanical systems (MEMS) technologies.…”

Section: Introductionmentioning

confidence: 99%

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Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

et al. 2021

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A magnetic field measurement system based on an array of Hall sensors is proposed. The sensors are fabricated using conventional microelectromechanical systems (MEMS) techniques and consist of a P-type silicon substrate, a silicon dioxide isolation layer, a phosphide-doped cross-shaped detection zone, and gold signal leads. When placed within a magnetic field, the interaction between the local magnetic field produced by the working current and the external magnetic field generates a measurable Hall voltage from which the strength of the external magnetic field is then derived. Four Hall sensors are fabricated incorporating cross-shaped detection zones with an identical aspect ratio (2.625) but different sizes (S, M, L, and XL). For a given working current, the sensitivities and response times of the four devices are found to be almost the same. However, the offset voltage increases with the increasing size of the detection zone. A 3 × 3 array of sensors is assembled into a 3D-printed frame and used to determine the magnetic field distributions of a single magnet and a group of three magnets, respectively. The results show that the constructed 2D magnetic field contour maps accurately reproduce both the locations of the individual magnets and the distributions of the magnetic fields around them.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

et al. 2021

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“…The different position and direction of Hall effect sensors and permanent magnets generate different Hall effects [ 4 ]. A Hall sensor has an offset voltage, such that Petruk [ 5 ] presented a novel method of offset voltage minimization. Lozanova presented a novel three-axis sensor for simultaneous and independent magnetic-field component measurement based on the Hall effect [ 6 ], and subsequently constructed a novel single-chip sensing device [ 7 ].…”

Section: Introductionmentioning

confidence: 99%

Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors

Zhao

Shi

Zhang

et al. 2018

Sensors

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This paper proposes a decoupled six degrees of freedom (DOF) displacement measurement methodology, which is accomplished by utilizing six pairs of permanent magnets and six Hall sensors. Firstly, the coordinate transformation was mathematically derived, which represented the relationships between the main coordinate system of the motion system and each body coordinate system of the Hall sensors. With the aid of an ellipsoid function and the least squares method, only the output voltages of the six Hall sensors were required to decouple the six-DOF displacement and inclination of the motion platform with high accuracy. Finally, the experimental measurements demonstrate the effectiveness of the six DOF displacement measurement methodology, based on which the maximum errors of displacements can reach 0.23 mm and the maximum errors of inclinations can reach 0.07°.

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Novel Method of Offset Voltage Minimization in Hall-Effect Sensor

Cited by 2 publications

References 7 publications

Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors

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