1994
DOI: 10.1021/cm00039a007
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Novel Photoresists Incorporating [(Trimethylsilyl)oxy]styrene

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Cited by 14 publications
(11 citation statements)
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“…A combination of monomers that satisfies these requirements is styrene and p-hydroxystyrene. Poly(p-hydroxystyrene) (pHS) and its derivatives are of interest for, e.g., applications in photoresist materials, [34][35][36][37] removal of organic material from aqueous waste via adsorption, 38 and as light-emitting devices. 39,40 In order to effectively polymerize p-hydroxystyrene, the acidic proton needs to be protected.…”
Section: Introductionmentioning
confidence: 99%
“…A combination of monomers that satisfies these requirements is styrene and p-hydroxystyrene. Poly(p-hydroxystyrene) (pHS) and its derivatives are of interest for, e.g., applications in photoresist materials, [34][35][36][37] removal of organic material from aqueous waste via adsorption, 38 and as light-emitting devices. 39,40 In order to effectively polymerize p-hydroxystyrene, the acidic proton needs to be protected.…”
Section: Introductionmentioning
confidence: 99%
“…Despite that deactivated aromatics do not react under the reaction conditions, this methodology of diaryl sulfoxides should provide a convenient route to the preparation of tri-arylsulfonium salts which are used as photoactive cationic initiators 7 and for the photogeneration of protonic acid in the lithographic resist field. 8,9…”
Section: Methodsmentioning
confidence: 99%
“…Despite that deactivated aromatics do not react under the reaction conditions, this methodology of diaryl sulfoxides should provide a convenient route to the preparation of triarylsulfonium salts which are used as photoactive cationic initiators 7 and for the photogeneration of protonic acid in the lithographic resist field. 8,9 …”
Section: Methodsmentioning
confidence: 99%