Novel Wideband Eddy Current Device for the Conductivity Measurement of Semiconductors

Loete, Florent; Bihan, Yann Le; Mencaraglia, Denis

doi:10.1109/jsen.2016.2544403

Cited by 13 publications

(5 citation statements)

References 5 publications

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“…Our innovative probing method [1][2] consists in injecting a multicarrier signal down a transmission line ended by a coil and measuring the reflected signal created by the line -coil impedance mismatch (Fig. 1).…”

Section: A Eddy Current Testing Systemmentioning

confidence: 99%

“…Those systems are therefore not sufficient and there is a strong need for a generic measurement system able to cover a large range of semiconductor materials without modifications. The multi-frequency eddy current system (MFECS) coupled to an electromagnetic model described in previous work [1][2] exhibits a very wide thickness and conductivity measurement range. The eddy currents depend on the conductivity of the inspected semiconductor wafer Our innovative probing method [1][2] consists in injecting a multicarrier signal down a transmission line ended by a coil and measuring the reflected signal created by the line -coil impedance mismatch (Fig.…”

Section: Introductionmentioning

confidence: 99%

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Contactless Conductivity Measurement for ITO Nanolayers on AsGa Substrats Over a Wide Frequency Range

et al. 2018

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We report on the application of a new contactless method based on eddy currents with a view to characterizing some transport properties of a large range of semiconductors. The innovative approach of this work consists in measuring the impedance of the coil by reflectometry using a broadband multicarrier test signal. The device works well with silicon wafers with a constant conductivity over a wide frequency range. Because of their electrical conductivity and high optical transmittance in the visible and near-IR regions of electromagnetic spectrum, indium tin oxide (ITO) films have motivated great interests in experimental studies and technological applications. The estimation of their electrical conductivity is a key point to develop these devices. On this paper we show that the setup can be used for the frequency characterization of ITO and AsGa nanolayers wich exhibit a frequency dependent behavior. The low frequency measurement are found in agreement with the classical four point probe setup.

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Section: A Eddy Current Testing Systemmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Contactless Conductivity Measurement for ITO Nanolayers on AsGa Substrats Over a Wide Frequency Range

et al. 2018

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“…Moreover, a robust method by using frequency-dependent eddy current measurements was presented by Moulder et al to determine the electrical conductivity of the uniform conductive layers [18]. Conductivity profiling from inductance spectroscopic measurements [19] and the conductivity measuring instrument for semi-conductors [20] also have been explored. In terms of permeability measurements, it is still challenging to determine the permeability of the material due to the influence of the environment condition and the material conductivity on the response signal.…”

Section: Introductionmentioning

confidence: 99%

Methods of Controlling Lift-Off in Conductivity Invariance Phenomenon for Eddy Current Testing

Jin

Meng

et al. 2020

IEEE Access

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Prev iously, a conductivity invariance phenomena (CIP) has been discovered-at a certa in lift-off, the inductance change of the sensor due to a test sample is immune to conductivity variations, i.e. the inductance-lift-off curve passes through a common point at a certain lift-off, termed as conductivity invariance lift-off. However, this conductivity invariance lift-off is fixed for a particular sensor setup, which is not convenient for various sample conditions. In this paper, we propose using two parameters in the coil design-the horizontal and vertical distances between the transmitter and the receiver to control the conductivity invariance lift-off. The relationship between these two parameters and the conductivity invariance lift-off is investigated by simulation and experiments and it has been found that there is an approximate linear relationship between these two parameters and the conductivity invariance lift-off. This is useful for applications where the measurements have restrictions on lift-off, e.g. uneven coating thickness which limits the range of the lift-off of probe during the measurements. Therefore, based on this relationship, it can be easier to adjust the configuration of the probe for a better inspection of the test samples.

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“…Moreover, a robust method by using frequency-dependent eddy current measurements was presented by Moulder et al to determine the electrical conductivity of the uniform conductive layers [39]. Conductivity profiling from inductance spectroscopic measurements [40] and the conductivity measuring instrument for semi-conductors [41] also have been explored. In terms of permeability measurements, it is still challenging to determine the permeability of the material due to the influence of the environment condition and the material conductivity on the response signal.…”

Section: Introductionmentioning

confidence: 99%

Methods of Controlling Lift-off in Conductivity Invariance Phenomenon for Eddy Current Testing

Jin¹,

Meng²,

Yu³

et al. 2020

Preprint

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Previously, a conductivity invariance phenomena (CIP) has been discovered – at a certain lift-off, the inductance change of the sensor due to a test sample is immune to conductivity variations, i.e. the inductance – lift-off curve passes through a common point at a certain lift-off, termed as conductivity invariance lift-off. However, this conductivity invariance lift-off is fixed for a particular sensor setup, which is not convenient for various sample conditions. In this paper, we propose using two parameters in the coil design – the horizontal and vertical distances between the transmitter and the receiver to control the conductivity invariance lift-off. The relationship between these two parameters and the conductivity invariance lift-off is investigated by simulation and experiments and it has been found that there is an approximate linear relationship between these two parameters and the conductivity invariance lift-off. This is useful for applications where the measurements have restrictions on lift-off, e.g. uneven coating thickness which limits the range of the lift-off of probe during the measurements. Therefore, based on this relationship, it can be easier to adjust the configuration of the probe for a better inspection of the test samples.

show abstract

Novel Wideband Eddy Current Device for the Conductivity Measurement of Semiconductors

Cited by 13 publications

References 5 publications

Contactless Conductivity Measurement for ITO Nanolayers on AsGa Substrats Over a Wide Frequency Range

Contactless Conductivity Measurement for ITO Nanolayers on AsGa Substrats Over a Wide Frequency Range

Methods of Controlling Lift-Off in Conductivity Invariance Phenomenon for Eddy Current Testing

Methods of Controlling Lift-off in Conductivity Invariance Phenomenon for Eddy Current Testing

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