Numerical Modeling of the Electromechanical Interaction in MEMS

Hannot, Stephan; Rixen, Daniel J.

doi:10.1007/978-3-642-03344-5_11

Cited by 4 publications

(1 citation statement)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…will return a zero lowest eigenvalue when K is evaluated at pull-in, and in that case the eigen mode µ is known as the pull-in mode. This pull-in definition is very similar to the definition of limit point buckling [13].…”

Section: Static Pull-inmentioning

confidence: 86%

Stochastic finite element method for analyzing static and dynamic pull-in of microsystems

Hannot

Verhoosel

Rixen

2010

IOP Conf. Ser.: Mater. Sci. Eng.

View full text Add to dashboard Cite

Electro-mechanical sensors and actuators are a specific type of microsystems. The electrostatic pull-in value is one of the defining characteristics for these devices. Because the material and geometrical properties of micro fabricated systems are often very uncertain, this pull-in value can be subject to considerable variations. Therefore it is important to be able to estimate how uncertainty of mechanical properties propagates to the uncertainty of pull-in values. In this work the required design sensitivities of static and dynamic pull-in are derived. These sensitivities are used to perform a perturbation-based stochastic FEM analysis of an electromechanical device. This stochastic analysis consists of an uncertainty analysis and a reliability analysis. This stochastic analysis is validated by an expensive crude Monte Carlo computation.

show abstract

Section: Static Pull-inmentioning

confidence: 86%