Numerical simulation of an electromagnetic bending-mode cantilever microactuator

Morega, Alexandru M.; Tanase, Nicolae; Popa, Mihaela; Morega, Mihaela; Dumitru, J. B.

doi:10.1109/atee.2013.6563478

Cited by 7 publications

(8 citation statements)

References 8 publications

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“…Few designs are available though, from low frequency devices working out of resonance (at driving frequencies maximum 10% of the first resonance frequency) to resonant-frequency devices. This paper continues previous work on new type of EAs [3] usable in micro-mirrors positioning devices that deflect the light beam about one or two axes, which are part of laser processing stations that may replace conventional scanners. The EA is provided with a fixed coil and a moving, permanent magnets array (PMA).…”

Section: Introductionmentioning

confidence: 80%

“…Previous work [3] focused on different types of magnetization (in EA plane and out-of-EA plane) proving the horizontal one ( Fig. 1) is more stable, even though the forces are lower.…”

Section: The Electromagnetic Actuator In Memsmentioning

confidence: 99%

“…The first technique was used to prove the feasibility of the actuator and for the preliminary design of the actuator and electric circuit [3,5,6,7].…”

Section: The Linear Mathematical Modellingmentioning

confidence: 99%

“…The model parameters were derived through simulation using finite element methods [3,5,6]. The model assumes also a non-zero initial state, described by initial positions and forces at equilibrium.…”

Section: The Simulink Modelsmentioning

confidence: 99%

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Modelling and Simulation for Control of a Mems Electromagnetic Scanner

2017

IJOMAM

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Abstract:The article presents the mathematical modelling and simulation models of a MEMS electromagnetic scanning system, with the aim to discuss sources of nonlinear behavior and to compare voltage vs. current control modes. The electromagnetic (EM) actuators develop high forces at any scale, and can be used at both resonance or far from it. This study completes previous design and manufacturing work of the electro-mechanical structure and its electric supply circuits. A nonlinear mathematical model for a general case, with the main actuator connected to a second elastic system carrying the mirror, and the particular mathematical model for infinite contact impedance between the actuator and the mirror support, allowing use of a single degree of freedom model for the mechanical part, are presented. The models are simplified for current control strategy discussion, and their SIMULINK implementation is included altogether with the results of simulations that confirm the advantages of the current control.

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Section: Introductionmentioning

confidence: 80%

“…Previous work [3] focused on different types of magnetization (in EA plane and out-of-EA plane) proving the horizontal one ( Fig. 1) is more stable, even though the forces are lower.…”

Section: The Electromagnetic Actuator In Memsmentioning

confidence: 99%

“…The first technique was used to prove the feasibility of the actuator and for the preliminary design of the actuator and electric circuit [3,5,6,7].…”

Section: The Linear Mathematical Modellingmentioning

confidence: 99%

Section: The Simulink Modelsmentioning

confidence: 99%

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Modelling and Simulation for Control of a Mems Electromagnetic Scanner

2017

IJOMAM

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“…The proposed design is provided with a fixed coil and a moving micro-magnets array and the actuation is achieved through the electrodynamic interaction between the permanent micro-magnets array and the electric current in the coils. The actual design advantages were discussed in previous papers [6,7], deduced based on modeling and simulation.…”

Section: Introductionmentioning

confidence: 99%

Micro Electromagnetic Actuator - Static Behavior

Comeaga

Ovezea²,

Ilie³

2018

MATEC Web Conf.

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The article presents a comparative study regarding the design and experimental results for a miniature electromagnetic actuator with a modified design comparing with the classical type, including a mobile array of micro-magnets and a fixed coil in two configurations (planar spiral multi-layered and cylindrical). Previous work on design, modeling and simulation of this type of actuator indicated the optimum design and conducted to dimensions and material parameters. Different types of actuators were produced and experimentally tested, showing good results but also some drawbacks. Three of these design solutions are presented together with the static voltage-deflection and electrical impedances curves, experimentally derived. The results confirmed the feasibility of two actuating solution, showing good linearity and possibility to control the position at h accuracy and indicated improving directions.

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A MEMS Electro-Mechanical Device for Scanning and Energy-Harvesting Based on Moving Magnets Matrix

Comeaga

Gheorghe

2017

Springer Proceedings in Physics

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Numerical simulation of an electromagnetic bending-mode cantilever microactuator

Cited by 7 publications

References 8 publications

Modelling and Simulation for Control of a Mems Electromagnetic Scanner

Modelling and Simulation for Control of a Mems Electromagnetic Scanner

Micro Electromagnetic Actuator - Static Behavior

A MEMS Electro-Mechanical Device for Scanning and Energy-Harvesting Based on Moving Magnets Matrix

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