1992
DOI: 10.1063/1.107951
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Off-axis laser deposition of YBa2Cu3O7−δ thin films

Abstract: We report on YBa2Cu3O7−δ thin-film preparation by a new laser deposition geometry, the so-called off-axis laser deposition. Combined with radiation-based substrate heating, this results in c-axis oriented, epitaxial YBa2Cu3O7−δ thin films with critical current densities above 106 A/cm2 at 77 K and zero field and an exceptionally good surface quality, with complete absence of the otherwise observed laser droplets. As proved by atomic force microscopy, the surface roughness is <80 Å over an area of at lea… Show more

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Cited by 235 publications
(69 citation statements)
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“…Previous understanding of laser deposition tended to assume and restrict attention to near-ballistic transfer of material from target to substrate. This new insight is helpfnl in understanding the observation [6] that off-axis deposition can be highly successful: it may arise through condensation of cool plasma species with near thermal energies, and all films, regardless of deposition geometry, will have a condensation overcoat. The absorption spectra show rather nicely the cooling of the species with time: the vibrational structure on the lines decays almost completely during the period of observation.…”
Section: Resultsmentioning
confidence: 95%
“…Previous understanding of laser deposition tended to assume and restrict attention to near-ballistic transfer of material from target to substrate. This new insight is helpfnl in understanding the observation [6] that off-axis deposition can be highly successful: it may arise through condensation of cool plasma species with near thermal energies, and all films, regardless of deposition geometry, will have a condensation overcoat. The absorption spectra show rather nicely the cooling of the species with time: the vibrational structure on the lines decays almost completely during the period of observation.…”
Section: Resultsmentioning
confidence: 95%
“…Here we note only that stimulated by the discovery of high-T C superconductivity, PLD technique has been succeeded with Y-Ba-Cu-O films in Dijkkamp et al (1987). The main further developments include the 'off-axis' variant (Holzapfel et al, 1992), which has essentially solved the problem of droplets, and later the 'molecular-beam' PLD (DeLeon et al, 1998) with realization of controllable layer-by-layer (LL) growth. Thus, PLD has become a basic technique for the preparation of multicomponent oxide films as well as oxide multilayers and superlattices of different functionality.…”
Section: Pulsed-laser Depositionmentioning
confidence: 99%
“…Цікавою є «off-axis» (неспіввісна) методика [10,11]. Підкла-дку розташовують вздовж осі плазмового факелу.…”
Section: лазерна ґенерація високотемпературної плазми та лазерні параunclassified