2015 IEEE 12th International Conference on Group IV Photonics (GFP) 2015
DOI: 10.1109/group4.2015.7305912
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On-chip hybrid integration of silicon nitride microdisk with colloidal quantum dots

Abstract: Abstract-We report on the fabrication of on-chip freestanding silicon nitride microdisks hybridly integrated with embedded colloidal quantum dots. An efficient coupling of quantum dot emission to resonant disk modes in the visible range is demonstrated.

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Cited by 3 publications
(2 citation statements)
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“…Extensive work has been undertaken to combine active materials with Si 3 N 4 waveguide wafers by adding additional materials such as III-V semiconductors [18], which require epitaxy or bonding of III-V materials to a silicon nitride waveguide wafer. In another example colloidal quantum dots were used for an optically pumped laser by embedding them in a Si 3 N 4 disc raised on a Si pillar [19], which required a rather elaborate fabrication. Both approaches could be, in principle, used for integrated light sources, however complexity of fabrication would limit the industrial relevance due to high costs.…”
Section: Introductionmentioning
confidence: 99%
“…Extensive work has been undertaken to combine active materials with Si 3 N 4 waveguide wafers by adding additional materials such as III-V semiconductors [18], which require epitaxy or bonding of III-V materials to a silicon nitride waveguide wafer. In another example colloidal quantum dots were used for an optically pumped laser by embedding them in a Si 3 N 4 disc raised on a Si pillar [19], which required a rather elaborate fabrication. Both approaches could be, in principle, used for integrated light sources, however complexity of fabrication would limit the industrial relevance due to high costs.…”
Section: Introductionmentioning
confidence: 99%
“…In our study, we have developed a fully inorganic and low-loss Si 3 N 4 -QD hybrid photonic platform by using a low-temperature (120°C-270°C) plasma enhanced chemical vapor deposition process and an optimized dry etching step, and demonstrated loss as low as 2.7 dB∕cm at 900 nm wavelength for waveguides with embedded QDs [49]. [50]. A spectrum for a disk of radius 3.5 μm is shown in Fig.…”
Section: B Colloidal Quantum Dot Integration On Si 3 N 4 Picsmentioning
confidence: 99%