On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements

Xu, Xiaochao; Wang, Qian; Tian, Ji'ao; Yang, Lujia; Fang, Yanyan; Wang, Qiu; Zhao, Chun; Hu, Fangjing; Tu, Liangcheng

doi:10.1109/jsen.2021.3106667

Cited by 12 publications

(3 citation statements)

References 25 publications

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“…The change in atmospheric pressure can affect the output of the MEMS gravity sensor in the form of the buoyant force, leading to a gravity-pressure coefficient of 501.5 μGal/hPa [23]. This possesses one of the major error sources for MEMS gravity sensors operating in atmospheric environment, especially considering the inaccuracy in the measurement of atmospheric pressure to remove the buoyant force effect.…”

Section: B Vacuum Chamber Systemmentioning

confidence: 99%

“…However, the structures in [20]- [22] employ quasi-zero springs with low natural frequencies to improve the sensitivity of the MEMS gravity sensors, resulting in a high requirement for the fabrication and installation of the MEMS gravimeters in practical use. To tackle this problem, a MEMS gravity sensor with a linear spring design (f0 = 14 Hz) and a capacitive displacement transducer was developed by Xu et al, and successfully observed Earth tide signals in an atmosphere environment by removing the effect of the ambient pressure fluctuations within a temperature-controlled system [23]. In addition to MEMS gravity sensors that are typically based on displacement transducers, MEMS devices based on vibrating elements can also be used to gravity measurements by tracking the frequency shift of the element.…”

Section: Introductionmentioning

confidence: 99%

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A Highly Stable and Sensitive MEMS-Based Gravimeter for Long-Term Earth Tides Observations

Yang

Wang

et al. 2022

IEEE Trans. Instrum. Meas.

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Precision measurements of local gravitational acceleration variations are of great importance in geophysical surveys. With advantages such as cost-effectiveness and portability, Micro-Electro-Mechanical system (MEMS)-based gravimeters have shown the potential for long-term gravity measurements. In this paper, aiming to further improve the stability of the instrument, the design considerations and system evaluations of a MEMS gravimeter are presented. With a linear spring design for the silicon proof-mass, a low natural frequency of ~14 Hz and a large linear range of ~10300 mGal are achieved with an ultra-low self-noise floor of 1.2 μGal/√Hz@1 Hz. By implementing a vacuum chamber system, the pressure variation is reduced from hundreds of Pa/day in atmosphere to a linear variation of ~6 Pa/day. In addition, an active temperature control system can suppress temperature fluctuations by 2 to 3 orders of magnitude within the band from 1×10 -4 Hz to 1×10 -2 Hz. The stability of the proposed MEMS gravimeter is demonstrated via long-term Earth tides observations within a 30-day time span, giving a correlation coefficient of 0.957 with the reference. An excellent bias instability of ≤4 μGal is demonstrated within the 8-3000 s averaging time range, representing one of the best performances to date in terms of stability for MEMS gravimeters. This shows the potential of high-performance MEMS gravimeters for petroleum and mineral prospecting, seismology and other geophysical applications.

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Section: B Vacuum Chamber Systemmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Highly Stable and Sensitive MEMS-Based Gravimeter for Long-Term Earth Tides Observations

Yang

Wang

et al. 2022

IEEE Trans. Instrum. Meas.

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“…Temperature control is critical in modern electronics, due to the multiple effects of temperature on the performance of almost all microelectronic devices [ 1 – 3 ], as diverse as accuracy [ 4 ], sensitivity [ 5 , 6 ], reliability [ 7 , 8 ], stability [ 9 , 10 ] and adjustability [ 11 – 14 ] of electronic components. Typically, temperature changes mainly come from diurnal and seasonal temperature variations of the external environment [ 15 ] (even a fluctuation of ~ 40 K/day or ~ 80 K/year) and the inevitable heating effect caused by operating internal high-power components (e.g., near-field wireless transmission of data [ 16 , 17 ] and power [ 18 , 19 ]) in the same microsystems.…”

Section: Introductionmentioning

confidence: 99%

On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

Jin,

Guo,

Pérez

et al. 2024

Nano-Micro Lett.

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Multidimensional integration and multifunctional component assembly have been greatly explored in recent years to extend Moore’s Law of modern microelectronics. However, this inevitably exacerbates the inhomogeneity of temperature distribution in microsystems, making precise temperature control for electronic components extremely challenging. Herein, we report an on-chip micro temperature controller including a pair of thermoelectric legs with a total area of 50 × 50 μm2, which are fabricated from dense and flat freestanding Bi2Te3-based thermoelectric nano films deposited on a newly developed nano graphene oxide membrane substrate. Its tunable equivalent thermal resistance is controlled by electrical currents to achieve energy-efficient temperature control for low-power electronics. A large cooling temperature difference of 44.5 K at 380 K is achieved with a power consumption of only 445 μW, resulting in an ultrahigh temperature control capability over 100 K mW−1. Moreover, an ultra-fast cooling rate exceeding 2000 K s−1 and excellent reliability of up to 1 million cycles are observed. Our proposed on-chip temperature controller is expected to enable further miniaturization and multifunctional integration on a single chip for microelectronics.

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A review of high-performance MEMS sensors for resource exploration and geophysical applications

Liu¹,

Luo²,

Hu³

et al. 2022

Petroleum Science

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On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements

Cited by 12 publications

References 25 publications

A Highly Stable and Sensitive MEMS-Based Gravimeter for Long-Term Earth Tides Observations

A Highly Stable and Sensitive MEMS-Based Gravimeter for Long-Term Earth Tides Observations

On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

A review of high-performance MEMS sensors for resource exploration and geophysical applications

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