2002
DOI: 10.1134/1.1467281
|View full text |Cite
|
Sign up to set email alerts
|

On the anisotropy of dielectric permittivity in single crystal lanthanum aluminate substrates

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

1
4
0

Year Published

2008
2008
2024
2024

Publication Types

Select...
7
2

Relationship

0
9

Authors

Journals

citations
Cited by 17 publications
(5 citation statements)
references
References 4 publications
1
4
0
Order By: Relevance
“…We find r = 24.3 for LaAlO 3 and r = 8.3 for MgAl 2 O 4 . We note that these values agree with previously measured values at temperatures above 70 K (23-25 and 8.3 respectively), indicating no large shift in the dielectric permittivity of either substrate with cooling [35,36].…”
Section: Resultssupporting
confidence: 92%
“…We find r = 24.3 for LaAlO 3 and r = 8.3 for MgAl 2 O 4 . We note that these values agree with previously measured values at temperatures above 70 K (23-25 and 8.3 respectively), indicating no large shift in the dielectric permittivity of either substrate with cooling [35,36].…”
Section: Resultssupporting
confidence: 92%
“…In addition, the LaAlO 3 film is a potential buffer layer for the growth of various perovskite films. Furthermore, because of the low conduction band offset, LaAlO 3 can be utilized as a charge storage layer in the fields of charge trap flash devices . In particular, LaAlO 3 is a powerful candidate for high- k materials in advanced Si-based complementary metal-oxide-semiconductor (CMOS) devices , because of its own unique features. , …”
Section: Introductionmentioning
confidence: 99%
“…3) Furthermore, a ZrO 2 or HfO 2 layer on silicon tends to form an interfacial silicate layer, which makes it difficult to achieve a thin effective oxide thickness. Therefore, LaAlO 3 that is thermally stable in contact with a Si substrate has become a promising alternative epitaxial gate oxide due to its high dielectric constant of 23 to 25, [4][5][6] a wide band gap of 5.6 to 6.5 eV, 7,8) and a high crystallization temperature. Moreover, crystalline LaAlO 3 can be grown epitaxially on a Si substrate, 3,9) since their lattice constants are very similar, exhibiting only a small difference of 1.3%.…”
Section: Introductionmentioning
confidence: 99%