2010 IEEE International Reliability Physics Symposium 2010
DOI: 10.1109/irps.2010.5488785
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On the differences between 3D filamentation and failure of N & P type drain extended MOS devices under ESD condition

Abstract: We present differences in the ESD failure mechanisms, intrinsic behavior and various phases of filamentation of STI type DeNMOS and DePMOS devices using detailed 3D TCAD simulations, TLP and TIM experiments. The impact of localized base-push-out, power dissipation because of space charge build-up, regenerative bipolar triggering and various events during the current filamentation are compared. Measurements show that the absence of base push out in DePMOS device leads to ~2.5X higher I T2 as compared to DeNMOS.

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Cited by 7 publications
(5 citation statements)
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“…An ideal current source (defined pulse shape) is used as the stress stimulus during electrothermal TCAD simulations with proper electrical and thermal contacts. The 3-D TCAD simulation approach is borrowed from our previous works [2], [4]. Various physical models are included to capture high field and high current effects, such as avalanche action, carrier recombination (Shockley-Read-Hall (SRH) and auger), and electric field-dependent mobility degradation models.…”
Section: Understanding the Root Cause Of Failurementioning
confidence: 99%
See 1 more Smart Citation
“…An ideal current source (defined pulse shape) is used as the stress stimulus during electrothermal TCAD simulations with proper electrical and thermal contacts. The 3-D TCAD simulation approach is borrowed from our previous works [2], [4]. Various physical models are included to capture high field and high current effects, such as avalanche action, carrier recombination (Shockley-Read-Hall (SRH) and auger), and electric field-dependent mobility degradation models.…”
Section: Understanding the Root Cause Of Failurementioning
confidence: 99%
“…High-voltage laterally double diffused MOS (LDMOS)-/ drain-extended nMOS (DeNMOS) devices cannot be used at the high-voltage pins as their failure current per unit area is small, resulting in unacceptably large cell size and capacitance [1]. The low failure current levels in high-voltage LDMOS/DeNMOS devices are attributed to space charge modulation (SCM)-induced filament formation at the onset voltage snapback [1]- [4]. Though previous works in [5], [6] tried to improve the LDMOS/DeNMOS ESD robustness, device survival beyond snap-back cannot be guaranteed.…”
mentioning
confidence: 99%
“…Under a positive voltage ESD stress at the drain, with the source grounded, breakdown takes place in the junction HVNW/Pwell and the parasitic NPN transistor turns on and discharges the ESD current. However, for conventional LDNMOS, it is not easy to get good ESD robustness [3], [4]. Especially, after avalanche breakdown in the latter case, the parasitic NPN transistor conducts and a large electron current is injected from the source (emitter) to the drain (collector), which may result in a strong snapback.…”
Section: Introductionmentioning
confidence: 99%
“…A high V hold can be achieved by decreasing current gain β of the parasitic NPN transistor [8], stacking the low-holding-voltage devices [2] or applying a non-snapback LDPMOS [4], [10] whose parasitic β is much lower than LDNMOS, but it may be damaged just after snapback as mentioned above or need more design work. Fig.…”
Section: Introductionmentioning
confidence: 99%
“…However, we found that devices like drain extended MOS [9] or in general devices which suffer from heavy charge modulation at early currents, cannot be modeled using 2D device simulations. As discussed in [10], since the modeling for the ESD behavior of various devices [11]- [13] is normally based on 2D simulations, it lacks the physical insight required to predict the 3D filamentation and failure. Moreover we also found that 2D simulations for ggNMOS or SCR like structures underestimate the It2 value [14].…”
Section: Introductionmentioning
confidence: 99%