“…At present, trans-scale precision positioning technology is divided into four types of driving methods. They are macro-micro hybrid driving (Gloess, 2006), piezoelectric ultrasonic driving (Holmes, Hocken, & Troumper, 2000), inchworm-type driving (Roh & Kwon, 2004) and slip-stick driving (Bergander, Breguet, Schmitt, & Clavel, 2000;Edeler & Fatikow, 2011). The frontal three driving methods can carry out trans-scale movement and have high resolution, but because of their complicated structures and control, they cannot be applied in many nano-manipulation mechanisms in tight and contained space.…”