2009
DOI: 10.1016/j.vacuum.2009.09.003
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Operating characteristics of the hollow anode glow discharge ion source

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Cited by 3 publications
(5 citation statements)
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“…1). Beyond this optimal value, plasma instability and mechanical design problems appeared which causes breakdown [4]. Under these conditions, the plasma meniscus should to be concave shape and this result in a focused ion beam (minimum beam diameter).…”
Section: Experimental Investigations and Resultsmentioning
confidence: 99%
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“…1). Beyond this optimal value, plasma instability and mechanical design problems appeared which causes breakdown [4]. Under these conditions, the plasma meniscus should to be concave shape and this result in a focused ion beam (minimum beam diameter).…”
Section: Experimental Investigations and Resultsmentioning
confidence: 99%
“…Also, the optimum length between both the cathode and the anode where found to be at 3mm where a highest possible output ion beam current is 55 μA at PAr + = 2.4x10 -3 Torr, and 0.6 mA discharge current, due to a stable high density plasma at this specific distance (see fig.1). Beyond this optimal value, plasma instability and mechanical design problems appeared which causes breakdown[4]. Under these conditions, the plasma meniscus should to be concave shape and this result in a focused ion beam (minimum beam diameter).…”
mentioning
confidence: 99%
“…1. The optimum distance between the anode and the cathode has been obtained before [3] and is equal to 3.5 mm. A Faraday cup is placed at a distance 3 cm from the cathode.…”
Section: Resultsmentioning
confidence: 99%
“…It is therefore of interest to examine this process in order to delineate its features and to show some of the possible directions of future use of this technology and to help define the characteristics of the system required to carry out this process. The properties of hollow anode glow discharge ion source have been described before [3]. Recent developments for this type of ion source have been carried out [4] in order to optimize its parameters and to improve its performance.…”
Section: Introductionmentioning
confidence: 99%
“…where T e for calculation of u B is used from Equation ( 4), where k is applied to check its effects for the compensation of A e f f for plasma particle losses. To simulate plasma parameters, the discharge current between electrodes was assumed to be given by the Child-Langmiur space-charge limited equation [10,15,16], along with the following conditions: radius of cylindrical source (R) = 10 mm, axial length (L) = 10 mm and argon gas as working gas.…”
Section: Modelmentioning
confidence: 99%