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The characteristics of ion beam extraction and focused to a volume as small as possible were investigated with the aid of computer code SIMION 3D version 7. This has been used to evaluate the extraction characteristics (accel-decel system) to generate an ion beam with low beam emittance and high brightness. The simulation process can provide a good study for optimizing the extraction and focusing system of the ion beam without any losses and transported to the required target. Also, a study of a simulation model for the extraction system of the ion source was used to describe the possible plasma boundary curvatures during the ion extraction that may be affected by the change in an extraction potential with a constant plasma density meniscus.

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In this work, glow discharge is formed by similar disc and conical electrode shapes from aluminum material at constant anode–cathode gap distance equal to 10 cm. The breakdown voltage and discharge current against the pressure × distance are measured at different pressures. The secondary electron emission coefficient is calculated using Townsend’s secondary ionization coefficient equation. A comparison is made between the breakdown voltage, discharge current, and secondary electron emission coefficient using disc and conical anode–cathode electrodes. Hence with a product of pressure and distance equal to 6 Torr cm, the secondary electron emission coefficient value of conical shape is higher than for the disc shape.

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