The need to reach single-mode lasing and minimize at the same time the electrical dissipation of cryogenically operated terahertz quantum cascade lasers may result in small and subwavelength cavity dimensions. To assess the influence of such dimensions on the shape of the laser emission, we have measured the beam pattern of two metal-metal cavity quantum cascade lasers. The patterns show regular angular intensity variations which depend on the length of the laser cavity. The physical origin of these features is discussed in terms of interference of the coherent radiation emitted by end and side facets of the laser bar. © 2006 American Institute of Physics. ͓DOI: 10.1063/1.2194889͔The quest for terahertz sources has resulted recently in the development of the terahertz quantum cascade laser ͑QCL͒. 1 At present, continuous-wave ͑cw͒ QCLs in the terahertz range have been demonstrated for frequencies as low as 2.0 THz ͑Ref. 2͒ and 1.9 THz ͑Ref. 3͒ ͑ Ϸ 160 m͒ and for temperatures up to 117 K. 4 These sources are very promising as local oscillators for heterodyne detection 5,6 and for general terahertz imaging applications. 7 The terahertz QCLs which have achieved the highest temperature performance are based on the so-called "metal-metal waveguides" of subwavelength dimensions. 8,9 Such waveguides minimize lasing threshold current densities due to their strong confinement of the mode to the gain region, their low losses, and their enhanced facet reflectivities. 10 Furthermore, the strong confinement has allowed the fabrication of structures with small lateral and transverse dimensions which minimizes electrical power dissipation; this is critical for their cryogenic operation and leads to improved cw performance. It is expected that the emitted beam from a cavity with subwavelength dimensions would be strongly divergent. 10 Study of the beam profile therefore is important to characterize this type of terahertz source.The heterostructure design employed for the terahertz QCLs used in this research is based on resonant longitudinaloptical-phonon scattering to selectively depopulate the lower radiation level. 11,12 The metal-metal waveguide was fabricated using a copper-to-copper thermocompression bonding technique. 8 We will report here results of beam profile measurements on two laser samples with subwavelength dimensions, fabricated from the same wafer. The metal-metal cavities are bonded to an n + GaAs substrate. The front and back facets of the cavities are uncoated. The cavity dimensions and the free space wavelengths are given in Table I, together with the relation between geometry and the Cartesian coordinate system, used to present the experimental data. Figure 1 shows our experimental setup used to measure the beam patterns. The n + GaAs substrate is indium soldered to a copper sample holder, which in turn is attached to the copper cold plate of a helium flow cryostat. The laser bar can be mounted in various orientations with respect to the 50 mm diameter window at a minimum distance of about 10 mm. It has bee...