Color centers in
diamond are widely explored as qubits in quantum
technologies. However, challenges remain in the effective and efficient
integration of these diamond-hosted qubits in device heterostructures.
Here, nanoscale-thick uniform diamond membranes are synthesized via
“smart-cut” and isotopically (
12
C) purified
overgrowth. These membranes have tunable thicknesses (demonstrated
50 to 250 nm), are deterministically transferable, have bilaterally
atomically flat surfaces (
R
q
≤
0.3 nm), and bulk-diamond-like crystallinity. Color centers
are synthesized via both implantation and in situ overgrowth incorporation.
Within 110-nm-thick membranes, individual germanium-vacancy (GeV
–
) centers exhibit stable photoluminescence at 5.4 K
and average optical transition line widths as low as 125 MHz.
The room temperature spin coherence of individual nitrogen-vacancy
(NV
–
) centers shows Ramsey spin dephasing times
(
T
2
*
) and Hahn echo times (
T
2
) as
long as 150 and 400 μs, respectively. This platform enables
the straightforward integration of diamond membranes that host coherent
color centers into quantum technologies.