2009
DOI: 10.1088/0256-307x/26/2/027802
|View full text |Cite
|
Sign up to set email alerts
|

Optical and Electrical Properties Evolution of Diamond-Like Carbon Thin Films with Deposition Temperature

Abstract: Optical and electrical properties of diamond-like carbon (DLC) films deposited by pulsed laser ablation of graphite target at different substrate temperatures are reported. By varying the deposition temperature from 400 to 25 ∘ C, the film optical transparency and electrical resistivity increase severely. Most importantly, the transparency and resistivity properties of the DLC films can be tailored to approaching diamond by adjusting the deposition temperature, which is critical to many applications. DLC films… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

1
4
0

Year Published

2013
2013
2024
2024

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 17 publications
(5 citation statements)
references
References 21 publications
1
4
0
Order By: Relevance
“…Using Koopman's hypothesis, which depends on the contrasts between the HOMO (highest included subatomic orbital) and LUMO (lowest empty subatomic orbital) energies the unbiased particle. Utilizing a limited contrast guess, the international amounts can be given by [21], which is in excellent agreement with the practical results in terms of better solar cell efficiency(3.54) and increased conductivity when increasing the energy at a thickness of 75 nm [15,23], as in Table 5:…”
Section: Top Viewssupporting
confidence: 73%
See 2 more Smart Citations
“…Using Koopman's hypothesis, which depends on the contrasts between the HOMO (highest included subatomic orbital) and LUMO (lowest empty subatomic orbital) energies the unbiased particle. Utilizing a limited contrast guess, the international amounts can be given by [21], which is in excellent agreement with the practical results in terms of better solar cell efficiency(3.54) and increased conductivity when increasing the energy at a thickness of 75 nm [15,23], as in Table 5:…”
Section: Top Viewssupporting
confidence: 73%
“…The thin films of DLC resistivity is majorly based on sp 2 amount. A greater sp 2 cluster causes a reduction in resistivity [21]. With the lowest laser energy (300mJ ), the resistivity value was (3.8×10 6 Ω .cm), and it decreased to about (5.99×10 3 Ω .cm) at 800 mJ.…”
Section: Dlc Films Electrical Characteristicsmentioning
confidence: 94%
See 1 more Smart Citation
“…Interference effect is absent at short wavelength because all films are opaque in UV light. Therefore, technological conditions affect on structural transformation of DLC films and they causes changing of ratio I D /I G of sp 3 (diamond-like) and sp 2 (graphite-like) fractions as it was earlier demonstrated in [5]. The structure and bonding in the films was investigated by Raman scattering spectra were measured on a Triplemate SPEX spectrometer with CCD camera and microscope for detection of the backscattering spectra with excitation by 488 nm laser line.…”
Section: Figurementioning
confidence: 97%
“…DLC is generally considered as the combination of sp 1 (acetylene-like), sp 2 (graphite-like), and sp 3 (diamond-like) bonding. Difference in sp 3 /sp 2 fraction in the deposited films which strongly dependent upon process conditions, some properties of films can be tailored and produce interesting specific properties which allowable DLC films used in many industries [4]. Among the various methods of plasma generation, DC plasma is consider as a simplest way to construct and offer a low cost deposition system.…”
Section: Introductionmentioning
confidence: 99%