“…[66,[96][97][98] As a result of this lattice mismatch, it has proven very difficult to avoid crystalline deterioration in In x Ga 1Àx N films with indium contents between 20 and 80 pct. [25,98] Compared to other III-nitride alloys, epitaxially grown In x Ga 1Àx N films have an extremely high threading dislocation density of up to 10 10 dislocations/cm 2 . [99,100] Despite this, In-…”