Optical dynamic gain equalizer using parallel motion type of ELCIA

Munechika, Masaki; Uezawa, H.; Oshima, A.; Konishi, Satoshi; Sano, Tomomi; Katayama, M.

doi:10.1109/memsys.2003.1189731

Cited by 4 publications

(1 citation statement)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…MEMS (micro-electro-mechanical systems) scanners have been widely adopted in a variety of photonics-related research fields or products. In telecommunications, they are the key enabling components for two-dimensional (2D) [1] and three-dimensional (3D) [2,3] optical cross-connects (OXCs), dynamic gain equalizers [4,5], wavelength adddrop multiplexers (WADMs) [6,7] and wavelength-selective switches (WSSs) [8][9][10]. They offer low optical insertion loss and crosstalk, independent of polarization and wavelength, as well as optical transparency for bit rate and data format.…”

Section: Introductionmentioning

confidence: 99%

Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

Tsai

Hsu

et al. 2007

J. Micromech. Microeng.

View full text Add to dashboard Cite

A driving scheme using a pair of differential voltages (V x , V y) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of ±3.2 • is achieved experimentally in both the x and y directions with the differential voltages ranging from −10 V to + 10 V.

show abstract

Section: Introductionmentioning

confidence: 99%

Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

Tsai

Hsu

et al. 2007

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

Picoliter Controllable Syringes Driven by Parallel Motions of Electrostatic Controlled Linear Inchworm Actuator

Yokokawa

Saika²,

Nakayama³

et al.

19th IEEE International Conference on Micro Electro Mechanical Systems

Self Cite

View full text Add to dashboard Cite

Merging parallel micro actuators and Micro Total Analysis Systems ( TAS) has made it possible to control a picoliter-scale liquid in this work.Sliders of Electrostatic Controlled Linear Inchworm Actuator (ECLIA) are applied to control motions of micro syringes. ECLIA can drive its sliders in parallel with high accuracy and large stroke. Requirements for syringe performance such as precise and parallel liquid control can be satisfied by above features of ECLIA. Several tens of pL can be controlled by several tens of nm stepwise motion of ECLIA in our experiments. Micro syringes integrated with the ECLIA driving mechanism will promise further progress of lab-on-a-chip for TAS. In addition, the approach has a significant implication that the electrostatic actuator performs a physical task to the outside actuator chip.

show abstract

Batch-fabricated high dense multi sliders for WDM spectral attenuation

Konishi

Oshima²,

Kinoshita³

et al.

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDU

View full text Add to dashboard Cite

This paper reports MEMS based mechanical dynamic gain equalizer (hereafter DGEQ) which is expected to equalize the non-uniformities of spectral intensity in WDM transportation. Batch-fabricated multi sliders for DGEQ are presented as our continuous research on optical application of electrostatic controlled linear inchworm actuator (hereafter ECLIA). 16 multi sliders (600 pm wide) corresponding to 16 channels are fabricated by DlUE and bonded on a pyrex glass substrate for a reliable electrical isolation. Operating of developed multi sliders and their optical attenuation as DGEQ will be reported in succession to design and fabrication of device.

show abstract

Optical dynamic gain equalizer using parallel motion type of ELCIA

Cited by 4 publications

References 3 publications

Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

Picoliter Controllable Syringes Driven by Parallel Motions of Electrostatic Controlled Linear Inchworm Actuator

Batch-fabricated high dense multi sliders for WDM spectral attenuation

Contact Info

Product

Resources

About