1999
DOI: 10.1557/jmr.1999.0587
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Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data

Abstract: Precise and accurate knowledge of the optical properties of aluminum nitride (AlN) in the ultraviolet (UV) and visible (VIS) regions is important because of the increasing application of AlN in optical and electro-optical devices, including compact disks, phase shift lithography masks, and AlN/GaN multilayer devices. The interband optical properties in the vacuum ultraviolet (VUV) region of 6-44 eV have been investigated previously because they convey detailed information on the electronic structure and intera… Show more

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Cited by 64 publications
(38 citation statements)
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“…To quantitatively determine the electronic structure of PS we have used Kramers-Kronig analysis [50,51] to determine the complex optical properties of PS over the complete energy range, encompassing the valence electronic structure. These results are essential information to calculate the full spectral Hamaker constants for vdW-Ld dispersion interactions for configurations including PS.…”
Section: Present Workmentioning
confidence: 99%
“…To quantitatively determine the electronic structure of PS we have used Kramers-Kronig analysis [50,51] to determine the complex optical properties of PS over the complete energy range, encompassing the valence electronic structure. These results are essential information to calculate the full spectral Hamaker constants for vdW-Ld dispersion interactions for configurations including PS.…”
Section: Present Workmentioning
confidence: 99%
“…Our work is similar to that of Jones et al [5], except that their films were prepared by RF sputtering. Our AlN films were grown using MBE on low-resistivity Si (111), cut 3° off towards (110), at 860°C with ammonia as the nitrogen source, therefore they might contain some hydrogen or silicon, which tend to reduce n. Because of the high affinity of AlN for oxygen, contamination with oxygen is a possibility [4], which would also reduce the value of n. Infrared transmission measurements of AlN on high-resistivity two-side polished Si are planned to determine the impurity content.…”
Section: Introductionmentioning
confidence: 64%
“…Much of the early results are based on pioneering work by Slack, who synthesized high-purity AlN single-crystals and studied their properties, particularly the high thermal conductivity [2,3]. Recent interest in AlN has shifted to thin films prepared on different substrates (Si, SiC, sapphire) using a variety of techniques, such as molecular beam epitaxy (MBE), chemical vapor deposition [4], and RF sputtering [5].…”
Section: Introductionmentioning
confidence: 99%
“…For the purpose of VUV radiation detection, the penetration depth 1/α(λ) of diamond and AlN materials derived from [11][12][13][14][15][16][17] drops drastically to extremely small values of the order of few nanometres. As shown in Fig.…”
Section: Motivation For Utilizing a Planar Structure -Msm Photodetectorsmentioning
confidence: 99%