Optical properties of AlN layers obtained by magnetron sputtering

Abstract

The growth of AlN layers on glass substrates using magnetron sputtering method was performed and the grown layers were subjected to optical measurements. Transmission spectra of the layers grown at different content of N2 in the atmosphere were obtained. The transmission spectra as well as energy gap depended on N2 content. The annealing of the layers in air led to transmission changes and influenced energy gap and refractive index values.