The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003.
DOI: 10.1109/leos.2003.1252911
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Optical tools and techniques for failure analysis of modern integrated circuits

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Cited by 3 publications
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“…In the case of the light-induced voltage alteration (LIVA) technique, the device is placed in either a forward or reverse biased configuration with a constant-current power supply. While biased, the device is locally illuminated with a raster-scanning laser beam that has a wavelength above the silicon band gap [4]. As the laser beam is scanned across the device, it interacts with the sample by creating electron-hole pairs and generating photo-current near electrical junctions.…”
Section: Failure Analysis Techniques Overviewmentioning
confidence: 99%
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“…In the case of the light-induced voltage alteration (LIVA) technique, the device is placed in either a forward or reverse biased configuration with a constant-current power supply. While biased, the device is locally illuminated with a raster-scanning laser beam that has a wavelength above the silicon band gap [4]. As the laser beam is scanned across the device, it interacts with the sample by creating electron-hole pairs and generating photo-current near electrical junctions.…”
Section: Failure Analysis Techniques Overviewmentioning
confidence: 99%
“…Thermally-induced voltage alteration (TIVA) is similar to LIVA, except that the wavelength of the laser is below the band gap. As such, the laser no longer generates electron-hole pairs but will instead locally heat the laser-illuminated areas [4]. The resulting "induced voltage" or TIVA images can nondestructively identify low-resistance current leakage paths or areas of thermocouple-like activity in the device.…”
Section: Failure Analysis Techniques Overviewmentioning
confidence: 99%