Optical waveguides in LiNbO3 by ion exchange technique

Shah, Manhar L.

doi:10.1063/1.88014

Cited by 58 publications

(7 citation statements)

References 8 publications

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“…116,[121][122][123][124][125][126] Other than PE, a few other ions have also been used in such an exchange process with lithium to realize a refractive index change in LN. [127][128][129][130] ion-in diffusion, the PE method still has certain advantageous application scenarios, especially to assist dry/wet etching technologies to realize some innovative photonic devices. 131…”

Section: Proton Exchangementioning

confidence: 99%

Advances in lithium niobate photonics: development status and perspectives

Chen

et al. 2022

Adv. Photon.

139

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Section: Proton Exchangementioning

confidence: 99%

Advances in lithium niobate photonics: development status and perspectives

Chen

et al. 2022

Adv. Photon.

139

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“…According to [ 13 ] the low-energy electrons (< 50 eV) lose their energy predominantly by plasmon production. Following its creation, the plasmon decays rapidly into electron-hole pairs.…”

Section: Secondary Electron Energy Distribution Functionmentioning

confidence: 99%

Modeling of single event gate rupture in power MOSFETs under heavy ion irradiation

et al. 2014

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Destructive single event gate rupture (SEGR) occurring in the gate oxides of power MOSFETs under impact of heavy ions is studied and modeled. SEGR cross section of power MOSFET with 70 nm oxide thickness as function of gate voltage was measured for four types of heavy ions. A predictive formula for the SEGR cross section is derived and validated. This formula can be used as a predictive instrument for computation of survival probability in a given spectrum of heavy ions in space environments.

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“…Ion exchange, widely used to produce optical waveguides in glasses, was first used experimentally by Shah [39] to fabricate lithium niobate waveguides. He found that after immersing x-cut LiNbO 3 crystals in silver nitrate at 360°C for several hours ($s3 h) a silver/lithium ion exchange occurs.…”

Section: Ion Exchangementioning

confidence: 99%

Fabrication techniques of lithium niobate waveguides

Armenise

1988

IEE Proc. J Optoelectron. UK

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In the paper, the most commonly used fabrication techniques of optical waveguides in lithium niobate are reviewed. Diffusion processes such as out-diffusion of lithium oxide from the crystal surface, in-diffusion of metals, ion exchange and proton exchange, and ion implantation are analysed. The characteristics of LiNbO 3 optical waveguides prepared by the different technological procedures, are reported in relation with the fabrication conditions. High quality optical waveguides on lithium niobate can be produced by Ti in-diffusion in a dry O 2 atmosphere at temperatures above 1000°C for long diffusion times (>10h). However, despite the large amount of research done in this field, correlations between optical properties and structural characteristics have not yet been established.

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Optical waveguides in LiNbO3 by ion exchange technique

Cited by 58 publications

References 8 publications

Advances in lithium niobate photonics: development status and perspectives

Advances in lithium niobate photonics: development status and perspectives

Modeling of single event gate rupture in power MOSFETs under heavy ion irradiation

Fabrication techniques of lithium niobate waveguides

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