2022
DOI: 10.1063/5.0085365
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Optically pumped deep-UV multimode lasing in AlGaN double heterostructure grown by molecular beam homoepitaxy

Abstract: Multimode lasing at sub-300 nm wavelengths is demonstrated by optical pumping in AlGaN heterostructures grown on single-crystal AlN substrates by plasma-assisted molecular beam epitaxy. Edge-emitting ridge-based Fabry–Pérot cavities are fabricated with the epitaxial AlN/AlGaN double heterostructure by a combined inductively coupled plasma reactive ion etch and tetramethylammonium hydroxide etch. The emitters exhibit peak gain at 284 nm and modal linewidths on the order of 0.1 nm at room temperature. The applie… Show more

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Cited by 9 publications
(1 citation statement)
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“…There is a strong desire to study the growth of N-polar AlN on bulk AlN substrates to eliminate the above problems. Moreover, a homoepitaxial platform for N-polar AlN could offer new possibilities in deep-ultraviolet (UV) laser diodes and light-emitting diodes 26,27 . Besides suppressing optical losses due to the reduction in dislocation and point defect densities by growth on single-crystal AlN 28 , the N-polarity can improve the light output in deep-UV emitters by enhancing the injection efficiency 29 .…”
mentioning
confidence: 99%
“…There is a strong desire to study the growth of N-polar AlN on bulk AlN substrates to eliminate the above problems. Moreover, a homoepitaxial platform for N-polar AlN could offer new possibilities in deep-ultraviolet (UV) laser diodes and light-emitting diodes 26,27 . Besides suppressing optical losses due to the reduction in dislocation and point defect densities by growth on single-crystal AlN 28 , the N-polarity can improve the light output in deep-UV emitters by enhancing the injection efficiency 29 .…”
mentioning
confidence: 99%