Optimal design of a flexure-hinge precision stage with a lever

Hwang, Eun J; Min, Kyung S; Song, Shin Hyung; Ahn, Il Hyuk; Choi, Woo Chun

doi:10.1007/bf03026966

Cited by 13 publications

(4 citation statements)

References 8 publications

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“…The design and modeling of various hinge lever mechanisms of an amplification device are presented for increasing small PZT actuator out range in references. [20][21][22] Many developed stages have amplification mechanisms. [11][12][13][14][15][16] In those studies, various design conditions, to achieve a higher magnification ratio, were considered.…”

Section: B Review Of Previous Researchmentioning

confidence: 99%

Development of a novel 3-degrees of freedom flexure based positioning system

Kim

Ahn

Gweon

2012

Review of Scientific Instruments

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Flexure mechanisms have been widely used for nanometer positioning systems. This article presents a novel conceptual design of an ultra-precision 3-degrees of freedom (XYθ(Z)) positioning system with nanometer precision. The main purpose of this novel stage design is for the application of measurement equipment, in particular biological specimens. The stage was designed as a hollow type and with a compact size for the inverted microscope. This stage includes piezoelectric transducer actuators, double compound amplification mechanisms, moving plate, and capacitor sensors. The double compound amplification mechanism was designed using a mathematical model and analyzed by the finite element method. Since the relationship between the variables of the hinge parameters and system performances are complicated, an optimization procedure was used to obtain the optimal design parameters, which maximized the system bandwidth. Based on the solution of the optimization problem, the design of the stage and FEM simulation results are presented. Finally, the stage was manufactured and tested.

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Section: B Review Of Previous Researchmentioning

confidence: 99%

Development of a novel 3-degrees of freedom flexure based positioning system

Kim

Ahn

Gweon

2012

Review of Scientific Instruments

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“…The fundamental parameters of the mechanism rod are set in order to satisfy the mechanism's requirements to increase displacement: . The impact of each parameter on the output performance of the amplifier mechanism can be determined using formulas (14). Figure 6(a), (b), (c), and (d) illustrate how structural parameters affect the magnification ratio.…”

Section: Analyzing the Influence Of Structural Parametersmentioning

confidence: 99%

“…Tang et al designed a flexure hinge magnification mechanism based on the triangle and lever principle, based on GMA flexible commutation magnification [12]. Bolzmacher et al used the finite element analysis method to simulate and analyze the magnification performance of the multi-level lever displacement magnifying mechanism [13]; Hwang et al calculated the displacement amplification ratio of the precision positioning platform of the first-stage amplification mechanism of the lever flexure hinge [14]. However, the above research results do not consider the influence of the structural parameters of the flexible hinge on the magnification ratio of the magnifying mechanism.…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of Amplifying Mechanism in Gas-Liquid Thermoelectric Power Device

Huang

Zhen-jun

2022

J. Phys.: Conf. Ser.

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Aiming at the small output displacement of the gas-liquid temperature difference power device, a flexible hinge displacement amplification system was designed and optimized using the lever principle. The formula for calculating the magnification of the lever-type flexible hinge mechanism was derived by taking into account the offset of the flexible hinge's rotational center. Likewise, consider how the parameters of the mechanism affect the output performance of the amplifying mechanism. Combining SolidWorks and Workbench to improve the amplifying mechanism's parameters, find the best value for the parameters, and experimentally validate the optimized results. The research shows that the error between the experimental data and the finite element simulation value is 2.49%, which verifies the correctness of the simulation model. The design goals of high magnification of the mechanism and output after displacement amplification are realized.

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“…[ 1,38–42 ] Such robots should be developed to combine the performances of conventional XYθ ‐axis precision stages using ball screws with a maximum speed of around 10 mm s −1 with a repeatability of 0.5 μm, [ 43–45 ] and precise piezoelectric stages with a resolution of 1 nm within the range of around 0.2 mm. [ 46–50 ] Among these, some nonholonomic mobile robots incorporating piezoelectric elements [ 51–54 ] exhibit remarkable performance, including high speed and excellent mobility across challenging terrain. However, their suitability for precision tasks in confined spaces is limited due to their restricted mobility, stemming from their nonholonomic nature.…”

Section: Introductionmentioning

confidence: 99%

Automatic Holonomic Mobile Micromanipulator for Submillimeter Objects Inspired by the Rhinoceros Beetle

Suzuki,

Iida,

Tsukui

et al. 2024

Advanced Intelligent Systems

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Holonomic mobile micromanipulators driven by piezoelectric actuators offer precision and compact design. However, attaining both high speed and positioning repeatability with sufficient load capacity poses challenges, given that lightweight robots are susceptible to nonuniform driving surfaces and external forces. A holonomic beetle (HB) is proposed to realize a wide range, compact size, precise holonomic motion, automatic micromanipulation, and high‐speed movement simultaneously. Inspired by the biological makeup of a Rhinoceros Beetle, a length, weight, and load capacity of 8 cm, 74 g, and of 2000 g, respectively, are used. The HB is a two‐legged robot with a pseudoalternating tripod gait locomotion principle, with five piezoelectric actuators for XYθ displacement and switching of the contact leg. It achieves maximum walking velocities of 11.6 mm s−1 for translational motion and 19.3 deg s−1 for rotation, with a displacement resolution of 12 nm. Notably, under open‐loop control, the HB demonstrates high repeatability with a coefficient of variation of 0.3%. It exhibits the capability to climb 30°‐inclined surfaces, traverse flat surfaces with 0.1 mm bumps, and navigate 30 mm pits. Furthermore, the HB showcases practical automatic micromanipulation through visual servo control and machine learning, presenting potential applications in biomedical and microassembly fields.

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Optimal design of a flexure-hinge precision stage with a lever

Cited by 13 publications

References 8 publications

Development of a novel 3-degrees of freedom flexure based positioning system

Development of a novel 3-degrees of freedom flexure based positioning system

Design and Optimization of Amplifying Mechanism in Gas-Liquid Thermoelectric Power Device

Automatic Holonomic Mobile Micromanipulator for Submillimeter Objects Inspired by the Rhinoceros Beetle

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