2020
DOI: 10.1364/oe.389725
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Optimal ITO transparent conductive layers for InGaN-based amber/red light-emitting diodes

Abstract: Fabrication of indium tin oxide (ITO) was optimized for InGaN-based amber/red light-emitting diodes (LEDs). A radiofrequency sputtering reduced the sheet resistivity of ITO at low pressures, and a subsequent two-step annealing resulted in a low sheet resistivity (below 2×10 −4 Ωcm) and high transmittance (over 98%) in the amber and red regions between 590 nm to 780 nm. Double ITO layers by sputtering could form an excellent ohmic contact with p-GaN. Application of the double ITO layers on amber and red LEDs en… Show more

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Cited by 41 publications
(27 citation statements)
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“…Our group first developed a high-temperature growth technique for high-indium-content InGaN layers [16,17], and then employed strain engineering strategies from Ga2O3 substrates [18] and GaN templates [19] to active region structures [20]. We also improved the electrical and optical properties of InGaN LEDs in device design and fabrication [21,22]. Since InGaN-based green and red µLEDs do not perform as well as blue µLEDs, investigation of green and red µLEDs is crucial to identify the direction for future improvements.…”
mentioning
confidence: 99%
“…Our group first developed a high-temperature growth technique for high-indium-content InGaN layers [16,17], and then employed strain engineering strategies from Ga2O3 substrates [18] and GaN templates [19] to active region structures [20]. We also improved the electrical and optical properties of InGaN LEDs in device design and fabrication [21,22]. Since InGaN-based green and red µLEDs do not perform as well as blue µLEDs, investigation of green and red µLEDs is crucial to identify the direction for future improvements.…”
mentioning
confidence: 99%
“…One of the most popular methods to create WLED devices is freely dispensing the yellow phosphor yttrium aluminum garnet (YAG:Ce) onto a blue LED chip [5,6]. Nevertheless, the angular correlated color temperature achieved from this method is in poor quality and the "yellow ring" phenomenon that is disadvantageous to the light performance of WLED also occurs [7][8][9]. Researchers proposed various methods as solutions to these problems, for example, conformal-phosphor structure [10], adjusting the surface phosphor layer [11], lens design [12], and optimizing the structure of a WLED package [13,14].…”
Section: Introductionmentioning
confidence: 99%
“…Lighting devices that emit white light by converting phosphor materials (pc-LEDs) is an outstanding lighting solution with formidable performance in terms of life expectancy, manufacturing cost, lighting efficiency, endurance against impacts, and space-saving, thus, received growing attention in the lighting industry [1][2][3]. The white LED is expected to replace conventional lighting methods, although as the lighting demands evolve, the white light emitting diode (WLED) need to enhance their advantages while improving TELKOMNIKA Telecommun Comput El Control  The impacts of red-emitting phosphor Mg8Ge2O11F2:Mn 4+ on the color… (My Hanh Nguyen Thi) 951 the existing weakness [4][5][6].…”
Section: Introductionmentioning
confidence: 99%