Optimisation of copper electrodeposition processes for Si technology based inductive microsystems

A B S T R A C TThis is an in depth study in the knowledge of the nucleation and growth mechanism that governs copper electrodeposition in excess chloride media. In these conditions copper electro-reduction takes place via two well-separated steps, since the Cu(I) intermediate is stabilized through chloride complexation. The process was studied in two media, a deep eutectic solvent (DES) based on a mixture of urea and choline chloride, and in excess chloride aqueous solution, in order to also analyse solvent influence on the early stages of the deposition process. In both media, copper electrodeposition follows a nucleation and a diffusion controlled three-dimensional growth mechanism. In line with a previous work a double potentiostatic step signal was employed to record j-t transients associated to both nucleation and growth stages, and from them, the whole mechanistic analysis of the copper electrodeposition was performed. This analysis involved the calculation of the surface concentrations of Cu(II), free Cu(I) and complexed Cu (I) for any time and potential required and the application of Sharifker-Hills model, j m 2 t m products and rising part analysis including the calculated parameters, which are strengthened as valuable tools for complete copper electrodeposition analysis in these media.

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“…This has been heightened yet more by the massive use of copper in the electronics industry [1][2][3][4].…”

Section: Introductionmentioning

confidence: 99%

Advances in Copper Electrodeposition in Chloride Excess. A Theoretical and Experimental Approach

Sebastián

Torralba

Vallés

et al. 2015

Electrochimica Acta

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“…Taking this into account, the electromagnetic converter has been fabricated by combining standard microsystems technology processes, with electroplating post-processes for the fabrication of coils with thick Cu metal tracks by electrochemical (EC) deposition. This has also involved an optimization of the EC growth conditions (Cortés et al 2008) to minimize residual stress in the Cu layers and to optimize their adherence, since these are critical parameters that can compromise the viability and lifetime of the devices. The nucleus of the coil is slightly larger (8 9 8 mm 2 ) than the size of the magnet in order to avoid potential collisions of the magnet with the edges of the coil nucleus.…”

Section: Design Of the Microgenerator Prototypementioning

confidence: 99%

Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators

et al. 2009

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In this work, the design, fabrication and characterization of an electromagnetic inertial microgenerator compatible with Si micro-systems technology is presented. The device includes a fixed micromachined coil and a movable magnet mounted on a resonant polymeric structure. The characterization of the fabricated prototypes has allowed to observe the presence of non linear effects that lead to the appearance of hysteretic vibrational phenomenon. These effects are likely related to the mechanical characteristics of the polymeric membrane, and determine an additional dependence of vibration frequency on the excitation amplitude. Under such non linear conditions, power densities up to 40 µW/cm 3 are obtained for devices working with low level excitation conditions similar to those present in domestic and office environment.

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Design and electrochemical preparation of inductive copper coils for magnetic particles detection

Cortés¹,

Martı́nez

Serre³

et al. 2012

Sensors and Actuators B: Chemical

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Optimisation of copper electrodeposition processes for Si technology based inductive microsystems

Cited by 7 publications

References 16 publications

Advances in Copper Electrodeposition in Chloride Excess. A Theoretical and Experimental Approach

Advances in Copper Electrodeposition in Chloride Excess. A Theoretical and Experimental Approach

Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators

Design and electrochemical preparation of inductive copper coils for magnetic particles detection

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