Optimization of dry etching parameters for fabrication of polysilicon waveguides with smooth sidewall using a capacitively coupled plasma reactor

Cheemalapati, Surya; Ladanov, Mikhail; Winskas, John; Pyayt, Anna

doi:10.1364/ao.53.005745

Cited by 17 publications

(4 citation statements)

References 37 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Yet for cells, the previously mentioned methods are not entirely sufficient unless the refractive index is known for each cell being studied. By analyzing transmission density functions from a statistical approach, it should be very simple to program such equations into computer software, allowing for more sophisticated and precise analysis of cells, biological objects, and many other complex microparticles whereas well-established fabrication methods can be used for future device fabrication …”

Section: Discussionmentioning

confidence: 99%

Statistical Analysis of Photonic Crystal Spectra for the Independent Determination of the Size and Refractive Index of Cells

Stewart

Pyayt

2015

Langmuir

Self Cite

View full text Add to dashboard Cite

Photonic crystal flow cytometry is a very attractive platform due to its great sensitivity in combination with a very compact design. Previous studies have demonstrated the possibility to use spectral processing for the measurement of a wide range of parameters, from simple object counting to independent analysis of the buffer solution and immersed microscale objects. Here we propose to go to the next level and simultaneously determine the shape and the refractive index of the cells.

show abstract

Section: Discussionmentioning

confidence: 99%

Statistical Analysis of Photonic Crystal Spectra for the Independent Determination of the Size and Refractive Index of Cells

Stewart

Pyayt

2015

Langmuir

Self Cite

View full text Add to dashboard Cite

show abstract

“…Selectivity is vital during the etching process, as it determines the rate at which the substance is etched. Selectivity varies in wet etching, mostly between the photosensor and the materials or substance [89,90]. Materials can be etched in some directions (horizontally or vertically) at different rates.…”

Section: Micromachining Methods For Microconstructionmentioning

confidence: 99%

Design, Fundamental Principles of Fabrication and Applications of Microreactors

Bojang¹,

Wu²

2020

Processes

View full text Add to dashboard Cite

This study highlights the development of small-scale reactors, in the form of microstructures with microchannel networking. Microreactors have achieved an impressive reputation, regarding chemical synthesis ability and their applications in the engineering, pharmaceutical, and biological fields. This review elaborates on the fabrication, construction, and schematic fundamentals in the design of the microreactors and microchannels. The materials used in the fabrication or construction of the microreactors include silicon, polymer, and glass. A general review of the application of microreactors in medical, biological, and engineering fields is carried out and significant improvements in these areas are reported. Finally, we highlight the flow patterns, mixing, and scaling-up of multiphase microreactor developments, with emphasis on the more significant industrial applications.

show abstract

“…2) [44,45]. Double-side polished silicon wafers purchased from Nova Electronic Materials (Texas) were used as the substrate (Fig.…”

Section: Fabrication Flowmentioning

confidence: 99%

Optofluidic spectroscopy integrated on optical fiber platform

Archibong

Stewart

Pyayt

2015

Sensing and Bio-Sensing Research

Self Cite

View full text Add to dashboard Cite

a b s t r a c t Administering a wrong drug or a wrong dose can be extremely dangerous and can result in severe adverse effects or even the death of a patient. With human errors being possible, automatic real time identification of a drug and its concentration using technology is a viable option to decrease the chance of incorrect drug administration. As a step toward this goal, we propose a new optical fiber based spectroscopic system that has built-in filtration capabilities and thus can work in real time near patient without additional sample pre-processing. It is designed as a point probe consisting of an optical fiber with a miniature filtering reflector integrated on the interface. In the future it can be inserted into a bag for intravenous therapy (IV therapy) or in a syringe to measure the spectrum of the fluid and to confirm its properties. Additionally, use of microfluidic filtration allows to remove microscopic particles from the sample and thus decreases the noise and increases the sensitivity of spectroscopic measurement. In this study, an optofluidic system was fabricated, and filtration capabilities and measurement of cobalamin (vitamin B 12 ) concentration have been demonstrated. Ó 2014 Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http:// creativecommons.org/licenses/by-nc-nd/3.0/).

show abstract

Optimization of dry etching parameters for fabrication of polysilicon waveguides with smooth sidewall using a capacitively coupled plasma reactor

Cited by 17 publications

References 37 publications

Statistical Analysis of Photonic Crystal Spectra for the Independent Determination of the Size and Refractive Index of Cells

Statistical Analysis of Photonic Crystal Spectra for the Independent Determination of the Size and Refractive Index of Cells

Design, Fundamental Principles of Fabrication and Applications of Microreactors

Optofluidic spectroscopy integrated on optical fiber platform

Contact Info

Product

Resources

About