2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2019
DOI: 10.1109/sispad.2019.8870415
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Optimization of select gate transistor in advanced 3D NAND memory cell

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Cited by 3 publications
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“…In particular, since the number of slits for block-to-block separations is reduced to increase the chip density [11], the number of strings is expected to increase continuously; thereby, Y-mode program stress will be the main cause further diminishing the memory window. Second, since 3D NAND uses poly-silicon as channel material, the on/off characteristic of the select transistor is much worse than that of 2D NAND, and the off-state leakage current flows through the select gate in boosting mode, which weaken the program disturbance [13]. Third, since it is difficult to remove electrons in the polysilicon channel during the pre-charge operation due to the grain boundary trap [14,15], achieving high channel potential in boosting mode is very challenging.…”
Section: Improvement Of the Program Disturbmentioning
confidence: 99%
“…In particular, since the number of slits for block-to-block separations is reduced to increase the chip density [11], the number of strings is expected to increase continuously; thereby, Y-mode program stress will be the main cause further diminishing the memory window. Second, since 3D NAND uses poly-silicon as channel material, the on/off characteristic of the select transistor is much worse than that of 2D NAND, and the off-state leakage current flows through the select gate in boosting mode, which weaken the program disturbance [13]. Third, since it is difficult to remove electrons in the polysilicon channel during the pre-charge operation due to the grain boundary trap [14,15], achieving high channel potential in boosting mode is very challenging.…”
Section: Improvement Of the Program Disturbmentioning
confidence: 99%