Optimized integrated micro-hotplates in CMOS technology

Siegele, Martin; Gamauf, Christoph; Nemecek, A.; Mutinati, Giorgio C.; Steinhauer, Stephan; Köck, Anton; Kraft, Jochen; Siezert, Jorg; Schrank, Franz

doi:10.1109/newcas.2013.6573624

Cited by 22 publications

(15 citation statements)

References 10 publications

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“…The summary is sorted by year of publication, ranging from 2000 until 2018. 73,74,78,91,100,[106][107][108][109][110][111][112][113][114][115][116][117][118][119][120][121] Figure 7. Meander microheater design with a square pattern.…”

Section: Microheater Designmentioning

confidence: 99%

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Filipovic

Lahlalia

2018

J. Electrochem. Soc.

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The growing demand for the integration of functionalities on a single device is peaking with the rise of IoT. We are near to having multiple sensors in portable and wearable technologies, made possible through integration of sensor fabrication with mature CMOS manufacturing. In this paper we address semiconductor metal oxide sensors, which have the potential to become a universal sensor since they can be used in many emerging applications. This review concentrates on the gas sensing capabilities of the sensor and summarizes achievements in modeling relevant materials and processes for these emerging devices. Recent advances in sensor fabrication and the modeling thereof are further discussed, followed by a description of the essential electro-thermal-mechanical analyses, employed to estimate the devices' mechanical reliability. We further address advances made in understanding the sensing layer, which can be modeled similar to a transistor, where instead of a gate contact, the ionosorped gas ions create a surface potential, changing the film's conduction. Due to the intricate nature of the porous sensing films and the reception-transduction mechanism, many added complexities must be addressed. The importance of a thorough understanding of the electro-thermal-mechanical problem and how it links to the operation of the sensing film is thereby highlighted.

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Section: Microheater Designmentioning

confidence: 99%

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Filipovic

Lahlalia

2018

J. Electrochem. Soc.

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“…Proper µhp chips have been developed as a platform for gas sensing components using standard 0.35 μm CMOS technology by the industry partner ams AG [23]. Figure 6 shows a fully released µhp (size 70 × 70 µm 2 ) with 4 suspension arms connected to the rest of the Si chip containing two SnO 2 thin film gas sensors.…”

Section: Originalarbeitmentioning

confidence: 99%

Metal Oxide Nanowires for Gas Sensor Applications

Köck

Defregger

Kraker

et al. 2014

Berg Huettenmaenn Monatsh

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“…The use of nanomaterials and very thin films [2] provides a large reduction in mass to be heated and enables at the same time short response time and high sensitivity. For temperature control, so called micro-hotplates [3] are used. These micro-hotplates have a very low mass and a small form factor, enabling fast temperature switching and integration into electronic systems.…”

Section: Introductionmentioning

confidence: 99%

“…The sensors are mounted with the heater on top and the sensor film down. The chamber has a volume of approximately 24 cm 3 . Box II, Figure 2b, has the electronics integrated in one platform and is specially designed for micro-hotplate sensors.…”

Section: Introductionmentioning

confidence: 99%

A Novel Device for Functional Evaluation of Gas Sensing Layers

et al. 2018

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Chemical gas sensors are operated at elevated temperatures and the actual temperature has a tremendous influence on sensitivity and selectivity. From that perspective, precise temperature control over the chip is an absolute requirement. Next to a stable heating system, a controlled gas flow in the test box is required. The test gases should not cool down the sensor surface too much and not be heated up by the heater. To make the material integration easy and reduce the costs for sensor platforms, often rather large sensor devices are fabricated. We demonstrate that a combined approach of thermal analysis and computational fluid dynamics enables the co-design of gas flow path and heater to archive precise temperature conditions at the sensor material and in the surrounding test gas atmosphere.

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Optimized integrated micro-hotplates in CMOS technology

Cited by 22 publications

References 10 publications

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Metal Oxide Nanowires for Gas Sensor Applications

A Novel Device for Functional Evaluation of Gas Sensing Layers

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