Optimizing the design of spiral inductors on silicon

Post, John E.

doi:10.1109/82.818889

Cited by 43 publications

(22 citation statements)

References 4 publications

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“…In order to anticipate the design problems and propose the performance, it is essential to predict the behavior of the inductor as a function of their geometry and manufacturing parameters. Numerous research works has been published on modeling inductors (Lovelace et al 1994;Post 2000;Rotella and Zachan 2002;Zencir et al 2002;Tong and Tsui 2005) and on techniques to improve the quality factor (Q-factor) (Yeung et al;Lin et al 2005a, b;Itoi et al 2004). However, most of the modeling and the theoretical analysis in print aimed at spiral-type MEMS inductors.…”

Section: Introductionmentioning

confidence: 99%

Modeling, optimization and performance of high-Q MEMS solenoid inductors

et al. 2007

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Modeling, optimization and performance of onchip solenoid inductors is presented. MATLAB is used to get the p-equivalent circuit model parameters. The effects of the geometrical parameters on the inductance and quality factor (Q-factor) are different. Normally, the performance of the inductors can be improved by increasing the coil turns in a way and increasing the length of the conductor, but both of them will occupy more chip area, which is not good for the minimization of the on-chip system. It is desirable to improve the performance of inductor by increasing the height of the via. Of the three types of fabricated inductors covering the same area, the inductors with the height of via 15, 30 and 45 lm have high performance. The self-resonant frequency is up to 10 GHz. The inductances and Q-factors at peak-Q frequency (about 5.8 GHz) are 1.16, 1.35, 1.78 nH and 21.9, 27, 38, respectively.

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Section: Introductionmentioning

confidence: 99%

Modeling, optimization and performance of high-Q MEMS solenoid inductors

et al. 2007

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“…An optimization problem of spiral inductor involves maximization of quality factor and/or minimization of area that are generally done using enumeration algorithms [7,8] or numerical algorithms [9 -11]. Enumeration methods are inefficient because of its long computation time; however optimization may be performed efficiently by layout parameter bounding [12].…”

Section: Introductionmentioning

confidence: 99%

Performance study of fixed value inductors and their optimization using electromagnetic simulator

Haobijam

Paily

2008

Micro & Optical Tech Letters

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ABSTRACT:In this article, we present an extensive analysis of the dependence of quality factor, peak frequency, self resonance frequency, and area of a spiral inductor on its layout parameters, while keeping the inductance value constant as opposed to various studies reported. This performance trend study establishes the optimum metal width and number of turns for a specified inductance value and desired operating frequency. We propose here an algorithm for accurate design and optimization of spiral inductors using a 3D electromagnetic simulator with minimum number of inductor structure simulations, and thereby reducing its long computation time.

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“…Most of the research studies published in the literature utilized limited test structures to develop scalable inductor models. They also fail to ensure identical inductance values when making device performance comparisons at different application frequencies [11][12][13][14]. On the contrary, this research work has a huge test element group of 102 inductors spanning wide-ranging physical design parameters of 1.5 to 6.5-turn, widths from 4 to 32 µm and core diameters from 30 to 180 µm, to comprehensively test the proposed extraction strategy and model development methodology for the symmetrical inductors.…”

Section: Model Verification and Evaluation Of This Workmentioning

confidence: 99%

Modeling and Layout Optimization Techniques for Silicon-Based Symmetrical Spiral Inductors

Sia¹,

Lim²,

Ong³

et al. 2013

PIER

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Abstract-A scalable and highly accurate RF symmetrical inductor model (with model error of less than 5%) has been developed from more than 100 test structures, enabling device performance versus layout size trade-offs and optimization up to 10 GHz. Large conductor width designs are found to yield good performance for inductors with small inductance values. However, as inductance or frequency increases, interactions between metallization resistive and substrate losses render the use of large widths unfavorable as they consume silicon area and degrade device performance. These findings are particularly important when exploiting the cost-effective silicon-based RF technologies for applications with operating frequencies greater than 2.5 GHz.

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Optimizing the design of spiral inductors on silicon

Cited by 43 publications

References 4 publications

Modeling, optimization and performance of high-Q MEMS solenoid inductors

Modeling, optimization and performance of high-Q MEMS solenoid inductors

Performance study of fixed value inductors and their optimization using electromagnetic simulator

Modeling and Layout Optimization Techniques for Silicon-Based Symmetrical Spiral Inductors

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