Opto-mechanical Accelerometer Based On Strain Sensing By A Bragg Grating In A Planar Waveguide

Storgaard-Larsen, Torben; Bouwstra, S.; Leistiko, Otto

doi:10.1109/sensor.1995.721920

Cited by 6 publications

(6 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Since the displacement of the tip causes mechanical stress along the cantilever, maximizing the stress on the sensing element will maximize the performance. Therefore, the sensing element is placed at the supporting point where the stress reaches its maximum value of (12) where is the Young's Modulus, is the thickness, is the length, and is the displacement of the cantilever. The design of the grating, waveguide, and cantilever is related to the stress distribution on the cantilever.…”

Section: Cantilever Designmentioning

confidence: 99%

See 1 more Smart Citation

Design and analysis of an integrated optical sensor for scanning force microscopies

Kocabaş

Aydınlı

2005

IEEE Sensors J.

View full text Add to dashboard Cite

In this paper, a novel probe for displacement sensing will be introduced. It is based on a conventional GaAs cantilever, integrated with a Bragg grating as a photo-elastic strain sensor. The deflection of the cantilever is measured directly from the intensity modulation of the reflected light. The principle of the experimental setup and the sensor, as well as the theoretical investigation of the force and displacement sensitivity of the probe, is presented. Finite-element method simulations were performed to get the optimum sensor design. Transfer matrix method simulation of the waveguide grating have been described in detail. In order to enhance the sensitivity, different types of grating structures are discussed. Using this new design, it should be possible to achieve sensitivities, defined as the fractional change in detected optical power per unit displacement of the cantilever, as high as 10-4 Å-1 of cantilever deflection. © 2005 IEEE

show abstract

Section: Cantilever Designmentioning

confidence: 99%

“…This new design consists of an integrated optical waveguide loaded with a Bragg grating (BG) which acts as a photoelastic strain sensor. A similar method was used for an opto-mechanical accelerometer [12]. In Fig.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of an integrated optical sensor for scanning force microscopies

Kocabaş

Aydınlı

2005

IEEE Sensors J.

View full text Add to dashboard Cite

show abstract

“…It is worth mentioning that Si(110) is an active research area (Rao et al 2017;Dutta et al 2011;Hölke and Henderson 1999;Singh et al 2017;Swarnalatha et al 2018) and already being used for fabrication of various micro-machined/MEMS devices. Examples of Si(110) wafer based micro-machined devices include a high aspect ratio comb actuator (Kim et al 2002), a high sensitivity vertical hall sensor (Chiu et al 2001), a capacitive accelerometer for air bag application (Tsugai et al 1997), an opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide (Storgaard-Larsen et al 1996), a vertical-membrane optical-fiber pressure sensor (Tu and Zemel 1993), a micro-channel (Singh et al 2008) and an optical Fabry-Perot modulator (Chaffey et al 2004) etc.…”

Section: Case 3: Simultaneous Maximization Of Diaphragm Deflection Anmentioning

confidence: 99%

Material selection for optimum design of MEMS pressure sensors

2019

View full text Add to dashboard Cite

Choice of the most suitable material out of the universe of engineering materials available to the designers is a complex task. It often requires a compromise, involving conflicts between different design objectives. Materials selection for optimum design of a Micro-Electro-Mechanical-Systems (MEMS) pressure sensor is one such case. For optimum performance, simultaneous maximization of deflection of a MEMS pressure sensor diaphragm and maximization of its resonance frequency are two key but totally conflicting requirements. Another limitation in material selection of MEMS/ Microsystems is the lack of availability of data containing accurate micro-scale properties of MEMS materials. This paper therefore, presents a material selection case study addressing these two challenges in optimum design of MEMS pressure sensors, individually as well as simultaneously, using Ashby's method. First, data pertaining to micro-scale properties of MEMS materials has been consolidated and then the Performance and Material Indices that address the MEMS pressure sensor's conflicting design requirements are formulated. Subsequently, by using the micro-scale materials properties data, candidate materials for optimum performance of MEMS pressure sensors have been determined. Manufacturability of pressure sensor diaphragm using the candidate materials, pointed out by this study, has been discussed with reference to the reported devices. Supported by the previous literature, our analysis re-emphasizes that silicon with 110 crystal orientation [Si (110)], which has been extensively used in a number of micro-scale devices and applications, is also a promising material for MEMS pressure sensor diaphragm. This paper hence identifies an unexplored opportunity to use Si (110) diaphragm to improve the performance of diaphragm based MEMS pressure sensors.

show abstract

“…Thermally actuated gratings demonstrate diffraction-angle modulation from 1 to 35 mrad. 4,5 Other actuators include ͑1͒ motion of a seismic mass to strain a fiber Bragg grating in a planar waveguide 6 ; ͑2͒ acoustic modulation to scan the transmitted optical beam angle 7 ; ͑3͒ electrostatic actuation for vertical deflection of the whole grating structure to modulate the diffracted-order intensities, although the diffracted angles are unvaried 4 ; and ͑4͒ electrostatic actuation for variable blaze gratings, with reported deflection up to 44 mrad. 8 In this paper we propose a method of analog spatial modulation to achieve tunability in the diffracted angle by up to 400 rad, with a resolution of the order of 2 rad.…”

Section: Introductionmentioning

confidence: 99%

Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators

et al. 2003

View full text Add to dashboard Cite

We present a microfabricated grating whose period can be tuned in analog fashion to within a fraction of a nanometer. The tunable angular range is more than 400 microrad in the first diffracted order. The design concept consists of a diffractive grating defined onto a 400-nm membrane, with the membrane subsequently strained in the direction perpendicular to the grating grooves by thin-film piezoelectric actuation. The strain-tuned grating device was fabricated with microelectromechanical processes, utilizing both surface and bulk micromachining. The fabricated piezoelectric film achieved a measured dielectric constant of 1200. Device characterization yielded grating period changes up to 8.3 nm (0.21% strain in the membrane) at 10 V and a diffracted angular change of 486 microrad, in good agreement with the theory. Uniformity across the actuated grating and out-of-plane deflections are characterized and discussed.

show abstract

Opto-mechanical Accelerometer Based On Strain Sensing By A Bragg Grating In A Planar Waveguide

Cited by 6 publications

References 4 publications

Design and analysis of an integrated optical sensor for scanning force microscopies

Design and analysis of an integrated optical sensor for scanning force microscopies

Material selection for optimum design of MEMS pressure sensors

Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators

Contact Info

Product

Resources

About