Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing

Augel, Lion; Berkmann, Fritz; Latta, Daniel; Fischer, I. A.; Bechler, Stefan; Elogail, Yasmine; Kostecki, Konrad; Potje‐Kamloth, Karin; Schulze, Jörg

doi:10.1007/s10404-017-2007-3

Cited by 16 publications

(10 citation statements)

References 19 publications

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“…A comparison of our experimental results with experimental data from selected conventional, non-integrated plasmonic structures for refractive index sensing shows that the sensitivity in our setup is markedly higher than what can be observed for plasmonic Au nanoparticles 12 and, in particular, exceeds the sensitivities typically obtained in Al nanohole arrays 27 (see table 1). 28 700 647 Au nanocross 29 1400 500 Au nanopillar 30 1300 -1500 1000 Periodic array of Au mushrooms 31 1260 1010 Hybrid Au nanohole array 15 650 -700 670 Suspended NHA in Au film 32 795 717 Passivated Al NHA 27 700 -750 487 This work 1310 -1350 1180 When the device is incorporated into a microfluidic setup with a laser diode as the vertical illumination light source 33 , the operating wavelength λop is fixed. In this operating mode, a resonance peak shift induced by a change in nSup can be detected as a change in responsivity at λop.…”

Section: Resultsmentioning

confidence: 99%

Integrated Collinear Refractive Index Sensor with Ge PIN Photodiodes

et al. 2018

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Refractive index sensing is a highly sensitive and label-free detection method for molecular binding events. Commercial implementations of biosensing concepts based on plasmon resonances typically require significant external instrumentation such as microscopes and spectrometers. Few concepts exist that are based on direct integration of plasmonic nanostructures with optoelectronic devices for on-chip integration. Here, we present a CMOS-compatible refractive index sensor consisting of a Ge heterostructure PIN diode in combination with a plasmonic nanohole array structured directly into the diode Al contact metallization. In our devices, the photocurrent can be used to detect surface refractive index changes under simple top illumination and without the aid of signal amplification circuitry. Our devices exhibit large sensitivities > 1000 nm per refractive index unit in bulk refractive index sensing and could serve as prototypes to leverage the cost-effectiveness of the CMOS platform for ultra-compact, low-cost biosensors.

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Section: Resultsmentioning

confidence: 99%

Integrated Collinear Refractive Index Sensor with Ge PIN Photodiodes

et al. 2018

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“…In addition, variation in conditions such as humidity and SU-8 composition may affect fabrication protocols, contributing to batch-to-batch variability [ 214 ]. Other materials such as glass [ 215 ], polycarbonate (PC) [ 216 ], cyclic olefin copolymer (COC) [ 217 ] and epoxy [ 218 ] were also reported for the on-chip optofluidic integration.…”

Section: Optical Sensing System Integrationmentioning

confidence: 99%

Silicon Photonic Biosensors Using Label-Free Detection

Luan

Shoman

Ratner

et al. 2018

Sensors

291

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Thanks to advanced semiconductor microfabrication technology, chip-scale integration and miniaturization of lab-on-a-chip components, silicon-based optical biosensors have made significant progress for the purpose of point-of-care diagnosis. In this review, we provide an overview of the state-of-the-art in evanescent field biosensing technologies including interferometer, microcavity, photonic crystal, and Bragg grating waveguide-based sensors. Their sensing mechanisms and sensor performances, as well as real biomarkers for label-free detection, are exhibited and compared. We also review the development of chip-level integration for lab-on-a-chip photonic sensing platforms, which consist of the optical sensing device, flow delivery system, optical input and readout equipment. At last, some advanced system-level complementary metal-oxide semiconductor (CMOS) chip packaging examples are presented, indicating the commercialization potential for the low cost, high yield, portable biosensing platform leveraging CMOS processes.

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“…Moreover, the photodetector-combined sensor array is easy to make, just like a photodetector array, because each sensor can be independently operated without any external optical receiver. Therefore, the proposed structure is useful in the application of LoC systems over other photodetector sensors [12,13].…”

Section: Discussionmentioning

confidence: 99%

“…As photodetector-type sensors, Si disk photodetectors [12] and Ge PIN (positive-intrinsic-negative) photodetectors [13] have been reported as label-free refractive-index sensors. In this structure, the absorption coefficient of the material determines the amount of absorbed light per unit volume.…”

Section: Introductionmentioning

confidence: 99%

Design of Microdisk-Shaped Ge on Si Photodetector with Recess Structure for Refractive-Index Sensing

Seo

Park

Song

2019

Sensors

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In this paper, we introduce a disk-shaped Ge-on-Si photodetector for refractive-index difference sensing at an operating wavelength of 1550 nm. For the implementation of a small-scale sensor, a Ge layer was formed on top of a Si layer to increase the absorption coefficient at the expense of the light-detection area. Additionally, the sensor had a ring waveguide structure along the edge of the disk formed by a recess into the inner part of the disk. This increased the interaction between the dominant optical mode traveling along the edge waveguide and the refractive index of the cladding material to be sensed, and conclusively increased detection sensitivity. The simulation results show that the proposed sensor exhibited a detection sensitivity of >50 nm/RIU (Refractive Index Unit), a quality factor of approximately 3000, and a minimum detectable refractive index change of 0.95 × 10−2 RIU with a small disk radius of 3 μm. This corresponds to 1.67 times the sensitivity without a recess (>30 nm/RIU).

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Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing

Abstract: Vertical optofluidic biosensors based on refractive index sensing promise highest sensitivities at smallest area foot-print. Nevertheless, when it comes to large scale fabrication and

Cited by 16 publications

References 19 publications

Integrated Collinear Refractive Index Sensor with Ge PIN Photodiodes

Integrated Collinear Refractive Index Sensor with Ge PIN Photodiodes

Silicon Photonic Biosensors Using Label-Free Detection

Design of Microdisk-Shaped Ge on Si Photodetector with Recess Structure for Refractive-Index Sensing

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