2012 International Electron Devices Meeting 2012
DOI: 10.1109/iedm.2012.6478964
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Origin of transient V<inf>th</inf> shift after erase and its impact on 2D/3D structure charge trap flash memory cell operations

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Cited by 10 publications
(11 citation statements)
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“…Two other recent works use a methodology similar to ours to characterize 3D NAND devices based on different 3D NAND flash memory cell technologies (i.e., 3D floating-gate cell and 3D vertical gate cell) [38,94,95], which are less common than the 3D charge trap NAND flash memory cell technology that we test in this paper. Other recent works [23,31,78,80,92] report several differences of 3D NAND flash memory from planar NAND flash memory. These differences include (1) smaller program variation at high P/E cycle counts [80], (2) smaller program interference [80], (3) layer-to-layer process variation [92], (4) early retention loss [23,31,78], and (5) retention interference [23].…”
Section: Related Workmentioning
confidence: 99%
“…Two other recent works use a methodology similar to ours to characterize 3D NAND devices based on different 3D NAND flash memory cell technologies (i.e., 3D floating-gate cell and 3D vertical gate cell) [38,94,95], which are less common than the 3D charge trap NAND flash memory cell technology that we test in this paper. Other recent works [23,31,78,80,92] report several differences of 3D NAND flash memory from planar NAND flash memory. These differences include (1) smaller program variation at high P/E cycle counts [80], (2) smaller program interference [80], (3) layer-to-layer process variation [92], (4) early retention loss [23,31,78], and (5) retention interference [23].…”
Section: Related Workmentioning
confidence: 99%
“…Since scaling and design of 3D NAND are completely different from planar NAND, and with different implications on the memory reliability, new methodologies are [15] required. One of the problems of 3D NAND is the reduced cells density per single memory layer.…”
Section: Vertical Hole Design Limitationsmentioning
confidence: 99%
“…Waiting for the final V TH would significantly increase the total program/erase time and, of course, this is not acceptable. The transient threshold voltage shift after erase is due to hole re-distribution in the charge trap layer [15].…”
Section: Data Retentionmentioning
confidence: 99%
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“…More recently, increasing attention has been paid to the reliability issues of charge trapping memory (CTM). A lot of effort is dedicated to investigate the retention reliability issues caused by formation of vertical charge dipole [2], charge trapping into defects in high-k blocking oxide [3][4] and trapped charge redistribution after erasing [5], whereas much less research is aiming at discovering the performance of charge trapping memory after programming/erasing (P/E) cycling. However, the modeling of trap generation at Si/SiO 2 interface and inside tunneling oxide and their effects is of great importance to understand cyclingrelated degradation phenomenon of CTM.…”
Section: Introductionmentioning
confidence: 99%