Oscillators Based on Monolithically Integrated AlN TFBARs

Norling, Martin; Enlund, Johannes; Katardjiev, Ilia; Gevorgian, Spartak

doi:10.1109/tmtt.2008.2007091

Cited by 5 publications

(2 citation statements)

References 16 publications

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“…Liquid flow over the top electrodes was enabled by a microfluidic system, defined in PDMS. The details of the device fabrication can be found elsewhere [2]- [4].…”

Section: Methodsmentioning

confidence: 99%

FBAR Sensor Array for in Liquid Operation

et al. 2010

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“…Liquid flow over the top electrodes was enabled by a microfluidic system, defined in PDMS. The details of the device fabrication can be found elsewhere [2]- [4].…”

Section: Methodsmentioning

confidence: 99%

FBAR Sensor Array for in Liquid Operation

et al. 2010

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“…The development of a read-out circuit for FBARs, however, has different prerequisites than for the QCM because of the generally lower quality factors of the FBAR compared to the QCM and the higher variation of the resonance frequencies among different resonators originating from the FBAR production process. While oscillator based read-outs were previously presented [ 25 , 26 ], an impedance-based read-out is more robust especially in liquid environment. Schneider et al .…”

Section: Introductionmentioning

confidence: 99%

CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

Nirschl

Rantala

Tukkiniemi

et al. 2010

Sensors

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The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

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