A combination of the multifrequency C-V and the generation-recombination current spectroscopy is proposed for a complete extraction of density of states (DOS) in amorphous InGaZnO thin-film transistors (a-IGZO TFTs) over the full subband-gap energy range (E V ≤ E ≤ E C ) including the interface trap density between the gate oxide and the a-IGZO active layer. In particular, our result on the separate extraction of acceptorand donor-like DOS is noticeable for a systematic design of amorphous oxide semiconductor TFTs because the former determines their dc characteristics and the latter does their threshold voltage (V T ) instability under practical operation conditions. The proposed approach can be used to optimize the fabrication process of thin-film materials with high mobility and stability for massproduction-level amorphous oxide semiconductor TFTs.
Index Terms-Amorphous InGaZnO (a-IGZO), density of states (DOS), full subband gap, thin-film transistors (TFTs).